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公开(公告)号：US20110195850A1
公开(公告)日：2011-08-11
申请号：US13088284
申请日：2011-04-15
申请人： Sergey V. ROZHOK , Michael Nelson , Nabil A. Amro , Joseph S. Fragala , Raymond Roger Shile , John Edward Bussan , Dirk N. vanMerkestyn
发明人： Sergey V. ROZHOK , Michael Nelson , Nabil A. Amro , Joseph S. Fragala , Raymond Roger Shile , John Edward Bussan , Dirk N. vanMerkestyn
CPC分类号： G03F7/0002 , G01Q80/00 , G03F7/70383 , G03F9/00
摘要： An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
摘要翻译： 一种用于制造结构并从尖端到表面沉积材料的装置，用于以直写式模式进行图案化，提供行进宏观距离并提供纳米尺度图案化的能力。 适用于小规模制造和纳米光刻。 该仪器可以紧凑，并在实验台或台式机上使用。 一种装置，包括：至少一个多轴组件，其包括多个纳米定位阶段，至少一个笔组件，其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底 通过多轴组件，至少一个观察组件，至少一个控制器。 通过压电方法和装置和电动机的定位是特别有用的。 该设备可以包括集成的环境室和壳体，以及用于要输送的材料的油墨储存器。 观察组件可以是具有长工作距离的显微镜。 特别适用于制造生物芯片或微阵列。 多轴组件可以是五轴组件。 软件可以促进有效的使用。
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公开(公告)号：US20090023607A1
公开(公告)日：2009-01-22
申请号：US12116908
申请日：2008-05-07
申请人： Sergey V. Rozhok , Michael Nelson , Nabil A. Amro , Joseph S. Fragala , Raymond Roger Shile , John Edward Bussan , Dirk N. vanMerkestyn
发明人： Sergey V. Rozhok , Michael Nelson , Nabil A. Amro , Joseph S. Fragala , Raymond Roger Shile , John Edward Bussan , Dirk N. vanMerkestyn
CPC分类号： G03F7/0002 , G01Q80/00 , G03F7/70383 , G03F9/00
摘要： An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
摘要翻译： 一种用于制造结构并从尖端到表面沉积材料的装置，用于以直写式模式进行图案化，提供行进宏观距离并提供纳米尺度图案化的能力。 适用于小规模制造和纳米光刻。 该仪器可以紧凑，并在实验台或台式机上使用。 一种装置，包括：至少一个多轴组件，其包括多个纳米定位阶段，至少一个笔组件，其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底 通过多轴组件，至少一个观察组件，至少一个控制器。 通过压电方法和装置和电动机的定位是特别有用的。 该设备可以包括集成的环境室和壳体，以及用于要输送的材料的油墨储存器。 观察组件可以是具有长工作距离的显微镜。 特别适用于制造生物芯片或微阵列。 多轴组件可以是五轴组件。 软件可以促进有效的使用。
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公开(公告)号：US08235302B2
公开(公告)日：2012-08-07
申请号：US11109877
申请日：2005-04-20
申请人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
发明人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
CPC分类号： B30B15/065 , B30B15/34 , G06K19/06028
摘要： Methods for providing pharmaceutical compositions and objects with identification regions and identification features which are difficult to detect. Microlithography, nanolithography, and stamping methods are used. The identification features can be positive protrusions or negative indentations with respect to the surface. The identification regions can comprise bar codes and holograms. DPN printing or other lithographies such as electron beam lithography, optical lithography, or nanoimprint lithography can be used to prepare stamps, which are then used to prepare the identification features. Redundant patterns can be formed. The invention is useful for counterfeit prevention. An apparatus for stamping the identification features is also described.
摘要翻译： 用于提供药物组合物和物体具有难以检测的识别区域和识别特征的方法。 使用微光刻，纳米光刻和冲压方法。 识别特征可以是相对于表面的正突起或负凹痕。 识别区域可以包括条形码和全息图。 可以使用DPN印刷或诸如电子束光刻，光刻或纳米压印光刻的其它平版印刷术来制备标记，然后将其用于制备识别特征。 可以形成冗余图案。 本发明可用于防伪。 还描述了用于冲压识别特征的装置。
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公开(公告)号：US20100297190A1
公开(公告)日：2010-11-25
申请号：US12536465
申请日：2009-08-05
申请人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
发明人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
CPC分类号： B30B15/065 , B30B15/34 , G06K19/06028
摘要： Methods for providing pharmaceutical compositions and objects with identification regions and identification features which are difficult to detect. Microlithography, nanolithography, and stamping methods are used. The identification features can be positive protrusions or negative indentations with respect to the surface. The identification regions can comprise bar codes and holograms. DPN printing or other lithographies such as electron beam lithography, optical lithography, or nanoimprint lithography can be used to prepare stamps, which are then used to prepare the identification features. Redundant patterns can be formed. The invention is useful for counterfeit prevention. An apparatus for stamping the identification features is also described.
摘要翻译： 用于提供药物组合物和物体具有难以检测的识别区域和识别特征的方法。 使用微光刻，纳米光刻和冲压方法。 识别特征可以是相对于表面的正突起或负凹痕。 识别区域可以包括条形码和全息图。 可以使用DPN印刷或诸如电子束光刻，光刻或纳米压印光刻的其它平版印刷术来制备标记，然后将其用于制备识别特征。 可以形成冗余图案。 本发明可用于防伪。 还描述了用于冲压识别特征的装置。
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公开(公告)号：US20100294844A1
公开(公告)日：2010-11-25
申请号：US11109877
申请日：2005-04-20
申请人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
发明人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
CPC分类号： B30B15/065 , B30B15/34 , G06K19/06028
摘要： Methods for providing pharmaceutical compositions and objects with identification regions and identification features which are difficult to detect. Microlithography, nanolithography, and stamping methods are used. The identification features can be positive protrusions or negative indentations with respect to the surface. The identification regions can comprise bar codes and holograms. DPN printing or other lithographies such as electron beam lithography, optical lithography, or nanoimprint lithography can be used to prepare stamps, which are then used to prepare the identification features. Redundant patterns can be formed. The invention is useful for counterfeit prevention. An apparatus for stamping the identification features is also described.
摘要翻译： 用于提供药物组合物和物体具有难以检测的识别区域和识别特征的方法。 使用微光刻，纳米光刻和冲压方法。 识别特征可以是相对于表面的正突起或负凹痕。 识别区域可以包括条形码和全息图。 可以使用DPN印刷或诸如电子束光刻，光刻或纳米压印光刻的其它平版印刷术来制备标记，然后将其用于制备识别特征。 可以形成冗余图案。 本发明可用于防伪。 还描述了用于冲压识别特征的装置。
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公开(公告)号：US20120295030A1
公开(公告)日：2012-11-22
申请号：US13473533
申请日：2012-05-16
CPC分类号： B81C99/009 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T156/10 , Y10T156/1052
摘要： Improved high density, hard tip arrays for use in patterning are provided. An article comprises a handle chip; and a silicon nitride membrane bonded to at least a portion of the handle chip. The silicon nitride membrane comprises an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane. Another article comprises an elastomeric backing member; and an array of tips disposed on the elastomeric backing member. The tips of the array comprise a refractory material. Methods of making such articles are also provided.
摘要翻译： 提供了用于图案化的改进的高密度硬尖端阵列。 一种制品包括手柄芯片; 以及结合到手柄芯片的至少一部分的氮化硅膜。 氮化硅膜包括直接从氮化硅膜的表面延伸的多个氮化硅尖端的阵列。 另一制品包括弹性体背衬构件; 以及布置在弹性体背衬构件上的尖端阵列。 阵列的尖端包括耐火材料。 还提供制造这种制品的方法。
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公开(公告)号：US08261662B1
公开(公告)日：2012-09-11
申请号：US11268740
申请日：2005-11-08
申请人： Raymond Roger Shile , Terrisa Duenas , John Edward Bussan , Gregory J. Athas , Joseph S. Fragala , Jason R. Haaheim , Sylvain Cruchon-Dupeyrat , Jeffrey R. Rendlen
发明人： Raymond Roger Shile , Terrisa Duenas , John Edward Bussan , Gregory J. Athas , Joseph S. Fragala , Jason R. Haaheim , Sylvain Cruchon-Dupeyrat , Jeffrey R. Rendlen
IPC分类号： H01L21/02
CPC分类号： G02B21/0008 , G02B21/002
摘要： Improved actuated probes suitable for scanning probe lithography or microscopy, and especially direct-write nanolithography and method of fabrication thereof. In one embodiment, thermomechanically actuated cantilevers with oxide-sharpened microcast tips are inexpensively fabricated by a process that comprises low-temperature wafer bonding, such as (gold) thermocompressive bonding, eutectic or adhesive bonding. Also provided is a flexcircuit that electrically interconnects the actuated probes to external circuitry and mechanically couples them to the instrument actuator. An improved scanning probe lithography instrument, hardware and software, can be built around the actuated cantilevers and the flexcircuit. Finally, provided is an improved microfluidic circuit to deliver chemical compounds to the tips of (actuated) probes and a fabrication method for tall, high-aspect-ratio tips.
摘要翻译： 改进的适用于扫描探针光刻或显微镜的致动探针，特别是直写式纳米光刻及其制造方法。 在一个实施例中，通过包括低温晶片接合（例如（金））热压接合，共晶或粘合粘合的方法廉价地制造具有氧化物锐化的微型天线的热机械致动悬臂。 还提供了将致动的探针电连接到外部电路并将它们机械耦合到仪器致动器的挠性电路。 可以围绕致动的悬臂和柔性电路构建改进的扫描探针光刻仪器，硬件和软件。 最后，提供了一种改进的微流体电路，用于将化学化合物递送到（致动的）探针的尖端，以及用于高，高纵横比尖端的制造方法。
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8.发明申请Stamps with micrometer-and nanometer-scale features and methods of fabrication thereof 有权具有微米和纳米尺度特征的印模及其制造方法公开(公告)号：US20100294146A1
公开(公告)日：2010-11-25
申请号：US11305326
申请日：2005-12-19
申请人： Joseph S. Fragala , Cedric Loiret-Bernal , Hua Zhang , Raymond Roger Shile , Bjoern Rosner , Sylvain Cruchon-Dupeyrat
发明人： Joseph S. Fragala , Cedric Loiret-Bernal , Hua Zhang , Raymond Roger Shile , Bjoern Rosner , Sylvain Cruchon-Dupeyrat
IPC分类号： B44B5/02
摘要： Stamps and methods of making stamps for applications in anti-counterfeiting and authentication. The stamps are relatively small in size and feature nanoscale and microscale identification regions and features. High throughput manufacturing and high resolution methods are used to make the stamps including electron beam lithography and optical lithography. Anti-fouling coatings can be applied.
摘要翻译： 邮票和制作邮票的方法，用于防伪和认证。 邮票的尺寸相对较小，具有纳米尺度和微尺度识别区域和特征。 使用高通量制造和高分辨率方法来制作邮票，包括电子束光刻和光刻。 可以应用防污涂料。
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公开(公告)号：US20100235954A1
公开(公告)日：2010-09-16
申请号：US12465622
申请日：2009-05-13
摘要： A device comprising at least one cantilever comprising at least two tips is described, where the tips have substantially the same tip heights. Methods for making and using such a device are also provided. The height of one tip off of the surface can be more easily determined when the two tips have equal height.
摘要翻译： 描述了包括至少一个包括至少两个尖端的悬臂的装置，其中尖端具有基本上相同的尖端高度。 还提供了制造和使用这种装置的方法。 当两个尖端具有相等的高度时，可以更容易地确定一个尖端离开表面的高度。
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10.发明申请STAMPS WITH MICROMETER-AND NANOMETER-SCALE FEATURES AND METHODS OF FABRICATION THEREOF 有权具有微型和纳米尺度特征的标准及其制造方法公开(公告)号：US20120052415A1
公开(公告)日：2012-03-01
申请号：US13286954
申请日：2011-11-01
申请人： Joseph S. Fragala , Cedric Loiret-Bernal , Hua Zhang , Raymond Roger Shile , Bjoern Rosner , Sylvain Cruchon-Dupeyrat
发明人： Joseph S. Fragala , Cedric Loiret-Bernal , Hua Zhang , Raymond Roger Shile , Bjoern Rosner , Sylvain Cruchon-Dupeyrat
摘要： Stamps and methods of making stamps for applications in anti-counterfeiting and authentication. The stamps are relatively small in size and feature nanoscale and microscale identification regions and features. High throughput manufacturing and high resolution methods are used to make the stamps including electron beam lithography and optical lithography. Anti-fouling coatings can be applied.
摘要翻译： 邮票和制作邮票的方法，用于防伪和认证。 邮票的尺寸相对较小，具有纳米尺度和微尺度识别区域和特征。 使用高通量制造和高分辨率方法来制作邮票，包括电子束光刻和光刻。 可以应用防污涂料。
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