发明申请
- 专利标题: Phase change memory devices and methods of forming the same
- 专利标题(中): 相变存储器件及其形成方法
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申请号: US12219647申请日: 2008-07-25
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公开(公告)号: US20090026436A1公开(公告)日: 2009-01-29
- 发明人: Yoon-Jong Song , Seung-Pil Ko , Dong-Won Lim
- 申请人: Yoon-Jong Song , Seung-Pil Ko , Dong-Won Lim
- 优先权: KR10-2007-0074619 20070725
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L21/28
摘要:
A method of forming a phase change memory device includes forming a core pattern on a substrate, conformally forming a heat conductive layer on the substrate including the core pattern, anisotropically etching the heat conductive layer down to a top surface of the core pattern to form a heat electrode surrounding a sidewall of the core pattern, and forming a phase change memory pattern connected to a top surface of the heat electrode.
公开/授权文献
- US07939366B2 Phase change memory devices and methods of forming the same 公开/授权日:2011-05-10
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