发明申请
US20090026436A1 Phase change memory devices and methods of forming the same 失效
相变存储器件及其形成方法

Phase change memory devices and methods of forming the same
摘要:
A method of forming a phase change memory device includes forming a core pattern on a substrate, conformally forming a heat conductive layer on the substrate including the core pattern, anisotropically etching the heat conductive layer down to a top surface of the core pattern to form a heat electrode surrounding a sidewall of the core pattern, and forming a phase change memory pattern connected to a top surface of the heat electrode.
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