发明申请
- 专利标题： PRODUCTION OF CAVITIES THAT CAN BE FILLED WITH A FLUID MATERIAL IN AN OPTICAL MICROTECHNOLOGICAL COMPONENT
- 专利标题（中）： 生产可以用光学微生物组分中的流体物质填充的区域
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申请号： US12162841申请日： 2007-02-06
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公开(公告)号： US20090027767A1公开(公告)日： 2009-01-29
- 发明人: Jean-Charles Souriau , Nicolas Sillon , Jean-Pierre Joly
- 申请人： Jean-Charles Souriau , Nicolas Sillon , Jean-Pierre Joly
- 申请人地址： FR Paris
- 专利权人： COMMISSARIAT A L'ENERGIE ATOMIQUE
- 当前专利权人： COMMISSARIAT A L'ENERGIE ATOMIQUE
- 当前专利权人地址： FR Paris
- 优先权： FR06-50466 20060209
- 国际申请： PCT/EP07/51109 WO 20070206
- 主分类号： B29D11/00
- IPC分类号： B29D11/00 ; G02B5/20 ; B05D5/06
摘要：
A novel method makes it possible to form cavities intended to contain a liquid with determined optical properties within a film for optical use. The walls (38) of the cavities (40) are formed by plasma etching of a layer of transparent or light absorbent material (30, 34) transferred onto a microtechnological substrate, the walls (38) having a structured profile in order to limit the parasitic phenomena of light diffusion and diffraction.
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