发明申请
- 专利标题: TITANIUM COMPLEXES, THEIR PRODUCTION METHODS, TITANIUM-CONTAINING THIN FILMS, AND THEIR FORMATION METHODS
- 专利标题(中): 钛复合物,其生产方法,含钛薄膜及其形成方法
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申请号: US12093389申请日: 2006-11-01
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公开(公告)号: US20090036697A1公开(公告)日: 2009-02-05
- 发明人: Ken-ichi Tada , Koichiro Inaba , Taishi Furukawa , Hirokazu Chiba , Tetsu Yamakawa , Noriaki Oshima
- 申请人: Ken-ichi Tada , Koichiro Inaba , Taishi Furukawa , Hirokazu Chiba , Tetsu Yamakawa , Noriaki Oshima
- 申请人地址: JP Shunan-shi, Yamaguchi JP Ayase-shi, Kanagawa
- 专利权人: TOSOH CORPORATION,SAGAMI CHEMICAL RESEARCH CENTER
- 当前专利权人: TOSOH CORPORATION,SAGAMI CHEMICAL RESEARCH CENTER
- 当前专利权人地址: JP Shunan-shi, Yamaguchi JP Ayase-shi, Kanagawa
- 优先权: JP2005-326885 20051111
- 国际申请: PCT/JP2006/321880 WO 20061101
- 主分类号: C07F7/28
- IPC分类号: C07F7/28
摘要:
Objects of the present invention are to provide a novel titanium complex that has good vaporization characteristics and an excellent thermal stability, and becomes a raw material for forming a titanium-containing thin film by methods such as CVD method or ALD method, its production method, a titanium-containing thin film formed using the same, and its formation method. In the invention, a titanium complex represented by the general formula (1) is produced by reacting a diimine represented by the general formula (2) and metallic lithium, and then reacting a tetrakisamide complex represented by the general formula (3). (In the formulae, R1 and R4 represent an alkyl group having from 1 to 6 carbon atoms. R2 and R3 each independently represents a hydrogen atom or an alkyl group having from 1 to 3 carbon atoms. R5 and R6 each independently represents an alkyl group having from 1 to 4 carbon atoms.).
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