Invention Application
- Patent Title: CREATION OF CAPACITORS EQUIPPED WITH MEANS TO REDUCE THE STRESSES IN THE METAL MATERIAL OF THEIR LOWER STRUCTURES
- Patent Title (中): 具有减少其结构的金属材料应力的手段的电容器的创建
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Application No.: US12134490Application Date: 2008-06-06
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Publication No.: US20090040684A1Publication Date: 2009-02-12
- Inventor: Sebastien Cremer , Philippe Delpech , Sylvie Bruyere
- Applicant: Sebastien Cremer , Philippe Delpech , Sylvie Bruyere
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics SA
- Current Assignee: STMicroelectronics SA
- Current Assignee Address: FR Montrouge
- Priority: FR0755553 20070607
- Main IPC: H01G4/30
- IPC: H01G4/30 ; H01G9/00

Abstract:
The method for forming the microelectronic device having at least one two or three dimensional capacitor includes creating, on a substrate, a plurality of components and a number of superimposed metal interconnection levels. An insulating layer is formed above a metal interconnection level, and a horizontal metal zone of a next metal interconnection level in which one or more of the insulating blocks created from this insulating layer are incorporated is formed therein. The zone is designed to form a lower structural part of the capacitor.
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