Invention Application
US20090040684A1 CREATION OF CAPACITORS EQUIPPED WITH MEANS TO REDUCE THE STRESSES IN THE METAL MATERIAL OF THEIR LOWER STRUCTURES 有权
具有减少其结构的金属材料应力的手段的电容器的创建

CREATION OF CAPACITORS EQUIPPED WITH MEANS TO REDUCE THE STRESSES IN THE METAL MATERIAL OF THEIR LOWER STRUCTURES
Abstract:
The method for forming the microelectronic device having at least one two or three dimensional capacitor includes creating, on a substrate, a plurality of components and a number of superimposed metal interconnection levels. An insulating layer is formed above a metal interconnection level, and a horizontal metal zone of a next metal interconnection level in which one or more of the insulating blocks created from this insulating layer are incorporated is formed therein. The zone is designed to form a lower structural part of the capacitor.
Information query
Patent Agency Ranking
0/0