发明申请
US20090042481A1 METHOD OF CALIBRATING OR COMPENSATING SENSOR FOR MEASURING PROPERTY OF A TARGET SURFACE
审中-公开
用于测量目标表面性能的校准或补偿传感器的方法
- 专利标题： METHOD OF CALIBRATING OR COMPENSATING SENSOR FOR MEASURING PROPERTY OF A TARGET SURFACE
- 专利标题（中）： 用于测量目标表面性能的校准或补偿传感器的方法
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申请号： US11835624申请日： 2007-08-08
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公开(公告)号： US20090042481A1公开(公告)日： 2009-02-12
- 发明人: Rashid A. Mavliev , Gerald John Alonzo , Simon Yavelberg
- 申请人： Rashid A. Mavliev , Gerald John Alonzo , Simon Yavelberg
- 主分类号： B24B49/12
- IPC分类号： B24B49/12 ; G01B11/30
摘要：
A method of calibrating or compensating a sensor for measuring property of target surface is provided. In one embodiment, a liquid reference surface is formed on a platen. A sensor is used to measure a feature property of the reference surface. The measured feature property of the reference surface may be used to calibrate the sensor. Further, the sensor is used to measure the feature property of a polishing pad. The measured feature property of the reference surface may be used to compensate the measured feature property of the polishing pad.
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