发明申请
- 专利标题: METALIZED SEMICONDUCTOR SUBSTRATES FOR RAMAN SPECTROSCOPY
- 专利标题(中): 用于拉曼光谱的金属化半导体衬底
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申请号: US12017720申请日: 2008-01-22
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公开(公告)号: US20090046283A1公开(公告)日: 2009-02-19
- 发明人: Eric Mazur , Eric Diebold , Steven M. Ebstein
- 申请人: Eric Mazur , Eric Diebold , Steven M. Ebstein
- 主分类号: G01J3/44
- IPC分类号: G01J3/44 ; H01L21/00
摘要:
In one aspect, the present invention generally provides methods for fabricating substrates for use in a variety of analytical and/or diagnostic applications. Such a substrate can be generated by exposing a semiconductor surface (e.g., silicon surface) to a plurality of short laser pulses to generate micron-sized, and preferably submicron-sized, structures on the surface. The structured surface can then be coated with a thin metallic layer, e.g., one having a thickness in a range of about 10 nm to about 1000 nm.
公开/授权文献
- US07715003B2 Metalized semiconductor substrates for raman spectroscopy 公开/授权日:2010-05-11
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