发明申请
- 专利标题: POSITIVE RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD
- 专利标题(中): 积极抵抗组合和阻力图形成方法
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申请号: US11813765申请日: 2005-12-14
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公开(公告)号: US20090047600A1公开(公告)日: 2009-02-19
- 发明人: Takako Hirosaki , Tomoyuki Ando , Takuma Hojo
- 申请人: Takako Hirosaki , Tomoyuki Ando , Takuma Hojo
- 申请人地址: JP Kanagawa-ken
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kanagawa-ken
- 优先权: JP2005-034103 20050210
- 国际申请: PCT/JP2005/022971 WO 20051214
- 主分类号: G03C1/73
- IPC分类号: G03C1/73 ; G03F7/20
摘要:
Disclosed is a positive resist composition which can provide a positive resist composition and a resist pattern forming method, capable of forming a high resolution pattern with reduce LER, the positive resist composition comprising a resin component (A) which has acid dissociable, dissolution inhibiting groups and exhibits increased alkali solubility under the action of an acid, and an acid generator component (B) which generates an acid under exposure, wherein the resin component (A) contains a polymer compound (A1) having a structural unit (a1) derived from hydroxystyrene and a structural unit (a2) derived from an acrylate ester having acid dissociable, dissolution inhibiting groups, a fluorine atom or a fluorinated lower alkyl group being bonded at the α-position.
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