发明申请
- 专利标题: CRUCIBLE HEATING APPARATUS AND DEPOSITION APPARATUS INCLUDING THE SAME
- 专利标题(中): 可加热装置和沉积装置,包括它们
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申请号: US12196603申请日: 2008-08-22
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公开(公告)号: US20090050053A1公开(公告)日: 2009-02-26
- 发明人: Sok-Won NOH , Tae-Min Kang , Jin-Wook Seong , Sang-Bong Lee , Seung-Mook Lee , Jin-Woo Park , Sun-Hoe Kim , Myung-Jong Jung
- 申请人: Sok-Won NOH , Tae-Min Kang , Jin-Wook Seong , Sang-Bong Lee , Seung-Mook Lee , Jin-Woo Park , Sun-Hoe Kim , Myung-Jong Jung
- 申请人地址: KR Suwon-si
- 专利权人: Samsung SDI Co., Ltd
- 当前专利权人: Samsung SDI Co., Ltd
- 当前专利权人地址: KR Suwon-si
- 优先权: KR2007-84933 20070823
- 主分类号: B05C13/00
- IPC分类号: B05C13/00
摘要:
A crucible heating apparatus and a deposition apparatus including the same. The crucible heating apparatus includes: a crucible including a main body to house a deposition material, and a cover disposed on the main body, having a nozzle; a band coupled to the crucible, through contact parts; a thermocouple coupled to the band; a housing to house the crucible and the band; and a heater disposed inside the housing, to heat the deposition material.
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