发明申请
US20090050053A1 CRUCIBLE HEATING APPARATUS AND DEPOSITION APPARATUS INCLUDING THE SAME 有权
可加热装置和沉积装置,包括它们

CRUCIBLE HEATING APPARATUS AND DEPOSITION APPARATUS INCLUDING THE SAME
摘要:
A crucible heating apparatus and a deposition apparatus including the same. The crucible heating apparatus includes: a crucible including a main body to house a deposition material, and a cover disposed on the main body, having a nozzle; a band coupled to the crucible, through contact parts; a thermocouple coupled to the band; a housing to house the crucible and the band; and a heater disposed inside the housing, to heat the deposition material.
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