发明申请
- 专利标题： METHOD FOR INCREASING THE AREA OF NON-POLAR AND SEMI-POLAR NITRIDE SUBSTRATES
- 专利标题（中）： 增加非极性和半极性氮化物衬底区域的方法
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申请号： US12234340申请日： 2008-09-19
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公开(公告)号： US20090072353A1公开(公告)日： 2009-03-19
- 发明人: Asako Hirai , James S. Speck , Steven P. DenBaars , Shuji Nakamura
- 申请人： Asako Hirai , James S. Speck , Steven P. DenBaars , Shuji Nakamura
- 申请人地址： US CA Oakland
- 专利权人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- 当前专利权人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- 当前专利权人地址： US CA Oakland
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; H01L29/20
摘要：
A method for fabricating a high quality freestanding nonpolar and semipolar nitride substrate with increased surface area, comprising stacking multiple films by growing the films one on top of each other with different and non-orthogonal growth directions.
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