发明申请
- 专利标题： CHAMBER COMPONENTS WITH INCREASED PYROMETRY VISIBILITY
- 专利标题（中）： 具有增加色素可见性的CHAMBER组件
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申请号： US11859080申请日： 2007-09-21
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公开(公告)号： US20090078198A1公开(公告)日： 2009-03-26
- 发明人: JOSEPH YUDOVSKY , Brendan McDougall , Ravi Jallepally , Yi-Chiau Huang , Maitreyee Mahajani , Kevin Griffin , Andrew C. Sherman
- 申请人： JOSEPH YUDOVSKY , Brendan McDougall , Ravi Jallepally , Yi-Chiau Huang , Maitreyee Mahajani , Kevin Griffin , Andrew C. Sherman
- 主分类号： B05C21/00
- IPC分类号： B05C21/00 ; H01L21/66
摘要：
The present invention generally provides method and apparatus for non-contact temperature measurement in a semiconductor processing chamber. Particularly, the present invention provides methods and apparatus for non-contact temperature measurement for temperature below 500° C. One embodiment of the present invention provides an apparatus for processing semiconductor substrates. The apparatus comprises a target component comprises a material with higher emissivity than the one or more substrates.
公开/授权文献
- US07921803B2 Chamber components with increased pyrometry visibility 公开/授权日：2011-04-12
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