发明申请
US20090078570A1 TARGET/BACKING PLATE CONSTRUCTIONS, AND METHODS OF FORMING TARGET/BACKING PLATE CONSTRUCTIONS
审中-公开
目标/背板结构及其形成目标/背板结构的方法
- 专利标题: TARGET/BACKING PLATE CONSTRUCTIONS, AND METHODS OF FORMING TARGET/BACKING PLATE CONSTRUCTIONS
- 专利标题(中): 目标/背板结构及其形成目标/背板结构的方法
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申请号: US12259998申请日: 2008-10-28
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公开(公告)号: US20090078570A1公开(公告)日: 2009-03-26
- 发明人: Wuwen Yi , Ravi Rastogi , Jaeyeon Kim , Brett Clark , Susan D. Storhers , Michael Pinter , Janine K. Kardokus
- 申请人: Wuwen Yi , Ravi Rastogi , Jaeyeon Kim , Brett Clark , Susan D. Storhers , Michael Pinter , Janine K. Kardokus
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; B23K1/20 ; B23K28/00 ; B23K20/08
摘要:
Target/backing plate constructions and methods of forming target/backing plate constructions are disclosed herein. The targets and backing plates can be bonded to one another through an appropriate interlayer. The targets can comprise one or more of titanium, tantalum, titanium zirconium, hafnium, niobium, vanadium, tungsten, copper or a combination thereof. The interlayer can comprise one or more of silver, copper, nickel, tin, titanium and indium. Target/backing plate constructions of the present invention can have bond strengths of at least 20 ksi and an average grain size within the target of less than 80 microns.
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