发明申请
- 专利标题: Laser Direct Imaging Apparatus and Imaging Method
- 专利标题(中): 激光直接成像设备和成像方法
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申请号: US12191901申请日: 2008-08-14
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公开(公告)号: US20090086009A1公开(公告)日: 2009-04-02
- 发明人: Yoshitatsu Naito , Mitsuhiro Suzuki , Tomotsugu Katoh
- 申请人: Yoshitatsu Naito , Mitsuhiro Suzuki , Tomotsugu Katoh
- 申请人地址: JP Ebina-shi
- 专利权人: Hitachi Via Mechanics, Ltd.
- 当前专利权人: Hitachi Via Mechanics, Ltd.
- 当前专利权人地址: JP Ebina-shi
- 优先权: JP2007-228115 20070903
- 主分类号: B41J2/47
- IPC分类号: B41J2/47
摘要:
A laser beam direct imaging apparatus and an imaging method which can precisely determine a back-surface-side position with respect to a front-surface-side position even if any kind of photosensitive material is used. In the laser direct imaging apparatus, a laser beam is deflected toward a main scanning direction (X-axis direction) while a workpiece mounted on a table is moved in a sub-scanning direction (Y-axis direction) so that a pattern is imaged on the surface of the workpiece. Hollow pins are disposed on the table so that the tips of the hollow pins 20 project over the surface of the table by a predetermined distance. The workpiece is sucked onto the table so that indentations (indentations by the tips of the hollow pins) are formed on the back surface of the workpiece. When a pattern is imaged on the back surface, imaging is performed with reference to the indentations.
公开/授权文献
- US08314825B2 Laser direct imaging apparatus and imaging method 公开/授权日:2012-11-20
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