发明申请
- 专利标题： SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM
- 专利标题（中）： 使用机械开关机构的多个可移动臂的基板运输装置
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申请号： US12117415申请日： 2008-05-08
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公开(公告)号： US20090087288A1公开(公告)日： 2009-04-02
- 发明人: Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
- 申请人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
- 申请人地址： US MA Chelmsford
- 专利权人： Brooks Automation Inc.
- 当前专利权人： Brooks Automation Inc.
- 当前专利权人地址： US MA Chelmsford
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.