Invention Application
US20090088049A1 METHOD FOR REMOVAL OF SURFACE FILMS FROM RECLAIM SUBSTRATES 有权
从回收基板上去除表面膜的方法

METHOD FOR REMOVAL OF SURFACE FILMS FROM RECLAIM SUBSTRATES
Abstract:
Embodiments of the invention describe a method for reclaiming a substrate by removing surface films with media blasting. A substrate is provided having a surface film. Media blasting is performed on the substrate to remove the surface film from the surface. In one embodiment media blasting removes a film from the substrate top surface. In another embodiment media blasting removes a film from the substrate top surface and side surface.
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