发明申请
- 专利标题: CHARGED PARTICLE DETECTION DEVICES
- 专利标题(中): 充电颗粒检测装置
-
申请号: US11668846申请日: 2007-01-30
-
公开(公告)号: US20090090866A1公开(公告)日: 2009-04-09
- 发明人: Xu ZHANG , Joe WANG , Zhong-Wei CHEN
- 申请人: Xu ZHANG , Joe WANG , Zhong-Wei CHEN
- 申请人地址: TW Hsin-chu US CA Milpitas
- 专利权人: HERMES MICROVISION, INC., TAIWAN,Hermes-Microvision, Inc.
- 当前专利权人: HERMES MICROVISION, INC., TAIWAN,Hermes-Microvision, Inc.
- 当前专利权人地址: TW Hsin-chu US CA Milpitas
- 主分类号: G01T1/20
- IPC分类号: G01T1/20 ; G01N23/00 ; H01J3/14
摘要:
A charged particle detector consists of four independent light guide modules assembled together to form a segmented on-axis annular detector, with a center opening for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface. The outer region of the light guide block is shaped into four separate light guide output channels and each light guide output channel is coupled to a photomultiplier tube to allow light signal output from each channel to be amplified and processed separately.
公开/授权文献
- US07872236B2 Charged particle detection devices 公开/授权日:2011-01-18
信息查询