发明申请
- 专利标题: On-chip inductors with through-silicon-via fence for Q improvement
- 专利标题(中): 具有通硅栅的片上电感,提高Q值
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申请号: US11868392申请日: 2007-10-05
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公开(公告)号: US20090090995A1公开(公告)日: 2009-04-09
- 发明人: Li-Chun Yang , Ming-Ta Yang , Chao-Shun Hsu
- 申请人: Li-Chun Yang , Ming-Ta Yang , Chao-Shun Hsu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
A semiconductor structure for providing isolations for on-chip inductors comprises a semiconductor substrate, one or more on-chip inductors formed above the first semiconductor substrate, a plurality of through-silicon-vias formed through the first semiconductor substrate in a vicinity of the one or more on-chip inductors, and one or more conductors coupling at least one of the plurality of through-silicon-vias to a ground, wherein the plurality of through-silicon-vias provide isolations for the one or more on-chip inductors.
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