发明申请
- 专利标题： TEMPERATURE CONTROLLED SHOWERHEAD
- 专利标题（中）： 温度控制淋浴
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申请号： US12181927申请日： 2008-07-29
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公开(公告)号： US20090095220A1公开(公告)日： 2009-04-16
- 发明人: Henner Meinhold , Dan M. Doble , Stephen Lau , Vince Wilson , Easwar Srinivasan
- 申请人： Henner Meinhold , Dan M. Doble , Stephen Lau , Vince Wilson , Easwar Srinivasan
- 申请人地址： US CA San Jose
- 专利权人： NOVELLUS SYSTEMS INC.
- 当前专利权人： NOVELLUS SYSTEMS INC.
- 当前专利权人地址： US CA San Jose
- 主分类号： B05C11/00
- IPC分类号： B05C11/00
摘要：
A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
公开/授权文献
- US08673080B2 Temperature controlled showerhead 公开/授权日：2014-03-18
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