发明申请
- 专利标题: IONIZATION VACUUM GAUGE
- 专利标题(中): 离子真空计
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申请号: US11920085申请日: 2006-05-08
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公开(公告)号: US20090096460A1公开(公告)日: 2009-04-16
- 发明人: Fumio Watanabe , Reiki Watanabe
- 申请人: Fumio Watanabe , Reiki Watanabe
- 优先权: JP2005-136760 20050509
- 国际申请: PCT/JP2006/309612 WO 20060508
- 主分类号: G01L21/32
- IPC分类号: G01L21/32
摘要:
An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted from the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with heating means for heating the ion collector.
公开/授权文献
- US07741852B2 Ionization vacuum gauge 公开/授权日:2010-06-22
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