发明申请
US20090096460A1 IONIZATION VACUUM GAUGE 有权
离子真空计

  • 专利标题: IONIZATION VACUUM GAUGE
  • 专利标题(中): 离子真空计
  • 申请号: US11920085
    申请日: 2006-05-08
  • 公开(公告)号: US20090096460A1
    公开(公告)日: 2009-04-16
  • 发明人: Fumio WatanabeReiki Watanabe
  • 申请人: Fumio WatanabeReiki Watanabe
  • 优先权: JP2005-136760 20050509
  • 国际申请: PCT/JP2006/309612 WO 20060508
  • 主分类号: G01L21/32
  • IPC分类号: G01L21/32
IONIZATION VACUUM GAUGE
摘要:
An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted from the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with heating means for heating the ion collector.
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