公开(公告)号：US07332714B2

公开(公告)日：2008-02-19

申请号：US11375063

申请日：2006-03-15

申请人： Fumio Watanabe ,  Reiki Watanabe

发明人： Fumio Watanabe ,  Reiki Watanabe

IPC分类号： H01J49/42 ,  H01J49/28

CPC分类号： H01J49/147 ,  H01J41/10 ,  H01J49/4215

摘要： In a quadrupole mass spectrometer which measures partial pressure strength according to a gas type in a vacuum system from ion current intensity, a quadrupole mass spectrometer with a total pressure measurement electrode has a total pressure measurement electrode for examining an ion density disposed in a demarcation space which is comprised of a grid electrode and an ion focusing electrode. And, a vacuum system is provided with only the quadrupole mass spectrometer which measures partial pressure strength according to a gas type in the vacuum system from an ion current intensity and does not have an ionization vacuum gauge other than the quadrupole mass spectrometer.

摘要翻译： 在根据离子电流强度根据真空系统中的气体类型测量分压强度的四极杆质谱仪中，具有总压力测量电极的四极质谱仪具有用于检查设置在分界空间中的离子密度的总压力测量电极 其由栅电极和离子聚焦电极组成。 并且，仅具有四极质谱仪的真空系统，其根据离子电流强度根据真空系统中的气体类型测量分压强度，并且除四极质谱仪之外不具有电离真空计。

公开(公告)号：US20050000949A1

公开(公告)日：2005-01-06

申请号：US10831658

申请日：2004-04-26

申请人： Reiki Watanabe ,  Fumio Watanabe

发明人： Reiki Watanabe ,  Fumio Watanabe

IPC分类号： H05B7/16 ,  H01L21/00 ,  H01L21/324 ,  H05B7/148 ,  B23K10/00

CPC分类号： H01L21/67109

摘要： The present invention relates to a heating device and a heating method, by which a object subject to heating is heated using glow discharge. The constitution is that the heating device comprises (i) a structural body having (a) a first conductive substance, and (b) a second conductive substance provided so as to surround said first conductive substance, where said conductive substances form a space substantially isolated from outside air; and (ii) an exhaust port formed on said structural body to decompress said space, wherein electric power is applied between said first conductive substance and said second conductive substance to generate electric discharge in said decompressed space, the electric discharge is maintained to increase the temperature of said second conductive substance, and said second conductive substance is used as means for heating an object subject to heating.

摘要翻译： 加热装置和加热方法技术领域本发明涉及加热装置和加热方法，通过该加热装置和加热方法，使用辉光放电来加热被加热物体。 结构是加热装置包括（i）具有（a）第一导电物质的结构体和（b）设置成围绕所述第一导电物质的第二导电物质，其中所述导电物质形成基本隔离的空间 从外面的空气; 和（ii）形成在所述结构体上以对所述空间进行减压的排气口，其中在所述第一导电物质和所述第二导电物质之间施加电力以在所述减压空间中产生放电，保持放电以增加温度 的所述第二导电物质，并且所述第二导电物质用作加热被加热物体的装置。

公开(公告)号：US07741852B2

公开(公告)日：2010-06-22

申请号：US11920085

申请日：2006-05-08

申请人： Fumio Watanabe ,  Reiki Watanabe

发明人： Fumio Watanabe ,  Reiki Watanabe

IPC分类号： G01L21/32

CPC分类号： G01L21/32 ,  H01J41/04

摘要： An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted front the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with a heating device for heating the ion collector.

摘要翻译： 在与真空装置连通的真空容器（4）中具有格栅（2），电子源（3）和离子收集器（1）的至少三个电极的电离真空计振荡器 在电网（2）内和外部的电子源（3）通过振荡的电子电离飞入栅格（2）的气体分子，通过离子收集器（1）补充电离离子以转换成电流信号，并测量 根据获得的电流强度在真空装置中的气体分子密度（压力），其中离子收集器（1）设置有用于加热离子收集器的加热装置。

公开(公告)号：US20090096460A1

公开(公告)日：2009-04-16

申请号：US11920085

申请日：2006-05-08

申请人： Fumio Watanabe ,  Reiki Watanabe

发明人： Fumio Watanabe ,  Reiki Watanabe

IPC分类号： G01L21/32

CPC分类号： G01L21/32 ,  H01J41/04

摘要： An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted from the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with heating means for heating the ion collector.

摘要翻译： 在与真空装置连通的真空容器（4）中具有格栅（2），电子源（3）和离子收集器（1）的至少三个电极的电离真空计振荡从 在电网（2）内和外部的电子源（3）通过振荡的电子电离飞入栅格（2）的气体分子，通过离子收集器（1）补充电离离子以转换成电流信号，并测量 根据获得的电流强度，真空装置中的气体分子密度（压力），其中离子收集器（1）设置有用于加热离子收集器的加热装置。

公开(公告)号：US07091443B2

公开(公告)日：2006-08-15

申请号：US10831658

申请日：2004-04-26

申请人： Reiki Watanabe ,  Fumio Watanabe

发明人： Reiki Watanabe ,  Fumio Watanabe

IPC分类号： B23K10/00

CPC分类号： H01L21/67109

摘要： A heating device includes a first electrode and a second electrode including a planar portion providing a support surface for supporting an object to be heated in an external gaseous atmosphere to which the object to be heated and the support surface are exposed. The second electrode is formed as an enclosure enclosing and spaced from at least a portion of first electrode to define an interior space therebetween isolated from the external gaseous atmosphere. An exhaust port provides communication with the interior space for reducing the pressure within the interior space. A power supplies current between the first and second electrodes to produce an electric discharge within the internal space, thereby heating the second electrode and the object supported thereon.

摘要翻译： 加热装置包括第一电极和第二电极，第二电极包括平面部分，该平面部分提供用于支撑被加热物体和支撑表面暴露于的外部气体气氛中的被加热物体的支撑表面。 第二电极形成为封闭并与第一电极的至少一部分间隔开的外壳，以在其间隔开与外部气体气氛隔离的内部空间。 排气口提供与内部空间的连通以减小内部空间内的压力。 A在第一和第二电极之间提供电流，以在内部空间内产生放电，从而加热第二电极和支撑在其上的物体。

公开(公告)号：US20060226355A1

公开(公告)日：2006-10-12

申请号：US11375063

申请日：2006-03-15

申请人： Fumio Watanabe ,  Reiki Watanabe

发明人： Fumio Watanabe ,  Reiki Watanabe

IPC分类号： H01J49/28

CPC分类号： H01J49/147 ,  H01J41/10 ,  H01J49/4215

摘要： In a quadrupole mass spectrometer which measures partial pressure strength according to a gas type in a vacuum system from ion current intensity, a quadrupole mass spectrometer with a total pressure measurement electrode has a total pressure measurement electrode for examining an ion density disposed in a demarcation space which is comprised of a grid electrode and an ion focusing electrode. And, a vacuum system is provided with only the quadrupole mass spectrometer which measures partial pressure strength according to a gas type in the vacuum system from an ion current intensity and does not have an ionization vacuum gauge other than the quadrupole mass spectrometer.

摘要翻译： 在根据离子电流强度根据真空系统中的气体类型测量分压强度的四极杆质谱仪中，具有总压力测量电极的四极质谱仪具有用于检查设置在分界空间中的离子密度的总压力测量电极 其由栅电极和离子聚焦电极组成。 并且，仅具有四极质谱仪的真空系统，该四极质谱仪根据离子电流强度根据真空系统中的气体类型测量分压强度，并且除四极质谱仪之外不具有电离真空计。

公开(公告)号：US20120285168A1

公开(公告)日：2012-11-15

申请号：US13555077

申请日：2012-07-20

申请人： Fumio Watanabe

发明人： Fumio Watanabe

IPC分类号： F03G3/00

CPC分类号： F03G3/00

摘要： In a rotation drive device (10), each of rotating units (20) has a swing arm (23) which is supported so as to be swingable around a swing center axis (23A) provided in a support table (22), a weight (24) is provided at a position at which a length of an arm from the swing center axis (23A) of the swing arm (23) is longer, and a connection point in a fluid cylinder (25) side is provided at a position at which the length of the arm from the swing center axis (23A) is shorter.

摘要翻译： 在旋转驱动装置（10）中，每个旋转单元（20）具有摆动臂（23），所述摆动臂（23）被支撑成围绕设置在支撑台（22）中的摆动中心轴线（23A）摆动， （24）设置在从摆臂（23）的摆动中心轴（23A）的臂的长度较长的位置，并且在液压缸（25）侧的连接点设置在位置 其中臂从摆动中心轴线（23A）的长度较短。

公开(公告)号：US07297419B2

公开(公告)日：2007-11-20

申请号：US10862358

申请日：2004-06-08

申请人： Fumio Watanabe

发明人： Fumio Watanabe

IPC分类号： D02G3/00

CPC分类号： C23C8/36 ,  C22F1/02 ,  C22F1/08 ,  C23C8/02 ,  C23C28/048 ,  C23C30/00 ,  Y10T428/30

摘要： The present invention relates to a manufacturing method of a material for vacuum device used in a vacuum apparatus that generates ultra-high vacuum and performs processing. Its constitution has the steps of: reducing pressure around the alloy of Cu and a doping element; increasing the temperature of the alloy to outgas hydrogen from the alloy, and gathering the doping element near the surface of the alloy and precipitating the doping element; and exposing the alloy to single oxygen, single nitrogen, mixed gas of oxygen and nitrogen, ozone (O3), oxygen content compound, nitrogen content compound or oxygen-nitrogen content compound, or a combination of them, or a plasma thereof while the temperature of the alloy is maintained at a range of room temperature or higher and the temperature of the alloy increased for outgassing hydrogen or lower, whereby it is reacted with the precipitated doping element so that one of an oxide film, a nitride film and an oxide-nitride film of the doping element is formed on a surface layer of the alloy.

摘要翻译： 本发明涉及一种用于真空装置的真空装置的制造方法，该真空装置产生超高真空并进行处理。 其结构具有以下步骤：减少Cu和掺杂元素周围的合金压力; 提高合金的温度以从合金中排出氢气，并将掺杂元素聚集在合金表面附近并沉淀掺杂元素; 并将合金暴露于单氧，单氮，氧和氮的混合气体，臭氧（O 3 3 N），氧含量化合物，氮含量化合物或氧 - 氮含量化合物或它们的组合 或其等离子体，同时合金的温度保持在室温以上的范围内，并且合金的温度升高以使除气氢或更低，由此其与沉淀的掺杂元素反应，使得氧化物膜 在合金的表面层上形成掺杂元素的氮化物膜和氧化物氮化物膜。

公开(公告)号：US06643026B2

公开(公告)日：2003-11-04

申请号：US09779634

申请日：2001-02-09

申请人： Hideo Kanda ,  Fumio Watanabe ,  Fumio Kobayashi

发明人： Hideo Kanda ,  Fumio Watanabe ,  Fumio Kobayashi

IPC分类号： G01B902

CPC分类号： G01B9/02022 ,  G01B2290/70

摘要： In an optical system for an oblique incidence interferometer, first and second prisms are used for luminous flux dividing and for luminous flux combining, respectively. Reference light and measurement light are separated from each other at a surface where collimated coherent light enters or exits from the first prism, whereas the reference light and measurement light are combined together at a surface where the measurement light enters or exits from the second prism.

摘要翻译： 在用于倾斜入射干涉仪的光学系统中，第一和第二棱镜分别用于光通量分配和光通量组合。 参考光和测量光在准直相干光从第一棱镜进入或离开的表面彼此分离，而参考光和测量光在测量光进入或离开第二棱镜的表面处组合在一起。

公开(公告)号：US06373134B1

公开(公告)日：2002-04-16

申请号：US09514030

申请日：2000-02-25

申请人： Fumio Watanabe

发明人： Fumio Watanabe

IPC分类号： H01L2348

CPC分类号： H01L23/528 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device has an interconnection pattern that crosses a vertical step. The part of the vertical step crossed by the interconnection pattern includes a horizontal side-step. The horizontal side-step increases the total length of the crossing, thereby reducing the risk of electrical discontinuity at the crossing, without increasing the width of the interconnection pattern itself.

摘要翻译： 半导体器件具有穿过垂直台阶的互连图案。 通过互连图案交叉的垂直步骤的部分包括水平侧边。 水平侧边增加了交叉点的总长度，从而降低了交叉口处电气不连续的风险，而不增加互连图案本身的宽度。