发明申请
US20090098667A1 Method For Picking Up Semiconductor Chips From A Wafer Table And Method For Mounting Semiconductor Chips On A Substrate
有权
从晶圆表拾取半导体芯片的方法以及在基板上安装半导体芯片的方法
- 专利标题: Method For Picking Up Semiconductor Chips From A Wafer Table And Method For Mounting Semiconductor Chips On A Substrate
- 专利标题(中): 从晶圆表拾取半导体芯片的方法以及在基板上安装半导体芯片的方法
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申请号: US12247986申请日: 2008-10-08
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公开(公告)号: US20090098667A1公开(公告)日: 2009-04-16
- 发明人: Stefan Behler , Patrick Blessing
- 申请人: Stefan Behler , Patrick Blessing
- 申请人地址: CH Cham
- 专利权人: Oerlikon Assembly Equipment AG, Steinhausen
- 当前专利权人: Oerlikon Assembly Equipment AG, Steinhausen
- 当前专利权人地址: CH Cham
- 优先权: CH1562/07 20071009; CH1136/08 20080717
- 主分类号: H01L21/66
- IPC分类号: H01L21/66
摘要:
The invention relates to a method for picking up semiconductor chips from a wafer table and, optionally, their mounting on a substrate by means of a pick-and-place system. The position and orientation of the semiconductor chip to be mounted next are determined by means of a first camera and made available in the form of positional data relating to a first system of coordinates. The position and orientation of the substrate place on which the semiconductor chip will be mounted are determined by means of a second camera and made available in the form of positional data relating to a second system of coordinates. The conversion of coordinates of the first or second system of coordinates into coordinates of motion of the pick-and-place system occurs by means of two fixed mapping functions and two changeable correction vectors. The correction vectors are readjusted on the occurrence of a predetermined event.
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