Invention Application
- Patent Title: Surface Acoustic Wave (Saw) Based Pressure Sensor
- Patent Title (中): 基于表面声波(锯)的压力传感器
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Application No.: US11920893Application Date: 2006-04-27
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Publication No.: US20090100935A1Publication Date: 2009-04-23
- Inventor: Arthur Leigh , Paul Edward Vickery
- Applicant: Arthur Leigh , Paul Edward Vickery
- Priority: GB0510885.7 20050526
- International Application: PCT/GB2006/001546 WO 20060427
- Main IPC: G01N29/22
- IPC: G01N29/22

Abstract:
A SAW based pressure sensor comprises a base (2a) having an aperture (3) formed therein and a substrate (4) mounted on the base so as to completely overlie the aperture. The substrate (4) is adhered to the base (2a) so as to form a fluid tight seal around the periphery of the aperture (3). A first SAW resonator (5) is mounted on the substrate (4) wholly within the region overlying the aperture (3), whilst two further SAW resonators (6, 7) are mounted on the substrate wholly within a region which is stiffened by adhesion to the underlying base (2a), such that the two further SAW resonators (6, 7) are completely decoupled from the strain field arising in the substrate due to deflections thereof.
Public/Granted literature
- US07841241B2 Surface acoustic wave (SAW) based pressure sensor Public/Granted day:2010-11-30
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