Invention Application
US20090100935A1 Surface Acoustic Wave (Saw) Based Pressure Sensor 有权
基于表面声波(锯)的压力传感器

  • Patent Title: Surface Acoustic Wave (Saw) Based Pressure Sensor
  • Patent Title (中): 基于表面声波(锯)的压力传感器
  • Application No.: US11920893
    Application Date: 2006-04-27
  • Publication No.: US20090100935A1
    Publication Date: 2009-04-23
  • Inventor: Arthur LeighPaul Edward Vickery
  • Applicant: Arthur LeighPaul Edward Vickery
  • Priority: GB0510885.7 20050526
  • International Application: PCT/GB2006/001546 WO 20060427
  • Main IPC: G01N29/22
  • IPC: G01N29/22
Surface Acoustic Wave (Saw) Based Pressure Sensor
Abstract:
A SAW based pressure sensor comprises a base (2a) having an aperture (3) formed therein and a substrate (4) mounted on the base so as to completely overlie the aperture. The substrate (4) is adhered to the base (2a) so as to form a fluid tight seal around the periphery of the aperture (3). A first SAW resonator (5) is mounted on the substrate (4) wholly within the region overlying the aperture (3), whilst two further SAW resonators (6, 7) are mounted on the substrate wholly within a region which is stiffened by adhesion to the underlying base (2a), such that the two further SAW resonators (6, 7) are completely decoupled from the strain field arising in the substrate due to deflections thereof.
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