发明申请
- 专利标题: METAL GATE COMPATIBLE ELECTRICAL FUSE
- 专利标题(中): 金属门兼容电保险丝
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申请号: US11874385申请日: 2007-10-18
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公开(公告)号: US20090101989A1公开(公告)日: 2009-04-23
- 发明人: Xiangdong Chen , Deok-kee Kim , Chandrasekharan Kothandaraman
- 申请人: Xiangdong Chen , Deok-kee Kim , Chandrasekharan Kothandaraman
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/06
- IPC分类号: H01L27/06 ; H01L21/3205
摘要:
A dielectric material layer is formed on a metal gate layer for a metal gate electrode, and then lithographically patterned to form a dielectric material portion, followed by formation of a polycrystalline semiconductor layer thereupon. A semiconductor device employing a metal gate electrode is formed in a region of the semiconductor substrate containing a vertically abutting stack of the metal gate layer and the polycrystalline semiconductor layer. A material stack in the shape of an electrical fuse is formed in another region of the semiconductor substrate containing a vertical stack of the metal gate layer, the dielectric material portion, and the polycrystalline semiconductor layer. After metallization of the polycrystalline semiconductor layer, an electrical fuse containing a polycrystalline semiconductor portion and a metal semiconductor alloy portion is formed over the dielectric material portion that separates the electrical fuse from the metal gate layer.
公开/授权文献
- US08163640B2 Metal gate compatible electrical fuse 公开/授权日:2012-04-24
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