发明申请
US20090103093A1 Fast sample height, AOI and POI alignment in mapping ellipsometer or the like
有权
快速样品高度，AOI和POI校准在映射椭偏仪等
- 专利标题： Fast sample height, AOI and POI alignment in mapping ellipsometer or the like
- 专利标题（中）： 快速样品高度，AOI和POI校准在映射椭偏仪等
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申请号： US12313760申请日： 2008-11-25
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公开(公告)号： US20090103093A1公开(公告)日： 2009-04-23
- 发明人: Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
- 申请人： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
- 主分类号： G01N21/21
- IPC分类号： G01N21/21
摘要：
A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
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