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公开(公告)号：US08488119B2
公开(公告)日：2013-07-16
申请号：US12802734
申请日：2010-06-14
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J5/20 , G01J5/42 , G01N21/3581 , G01N2021/3595
摘要： A method of applying an ellipsometer or polarimeter system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz; wherein the ellipsometer or polarimeter system includes a source such as a backward wave oscillator, a Smith-Purcell cell, a free electron laser, an FTIR source or a solid state device; and a detector such as a Golay cell a bolometer or a solid state detector; and preferably includes at least one odd-bounce polarization state image rotating system and a polarizer, and at least one compensator and/or modulator, in addition to an analyzer.
摘要翻译： 一种应用椭圆光度计或偏振计系统的方法，其操作在300GHz或更低的频率范围内并且延伸到高于至少1Tera-Hz（THz），优选通过红外（IR）范围直到和 高于100 THz; 其中所述椭偏仪或偏振计系统包括诸如反向波振荡器，Smith-Purcell单元，自由电子激光器，FTIR源或固态器件的源; 以及诸如Golay电池的测辐射热计或固态检测器的检测器; 并且除了分析器之外，还优选地包括至少一个奇数反弹偏振态图像旋转系统和偏振器，以及至少一个补偿器和/或调制器。
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公开(公告)号：US20130163099A1
公开(公告)日：2013-06-27
申请号：US13694658
申请日：2012-12-26
申请人： Martin M. Liphardt
发明人： Martin M. Liphardt
IPC分类号： G02B3/00
CPC分类号： G01J4/00 , G01J3/0208 , G01J3/0229 , G02B3/00 , G02B5/005 , G02B27/46 , G02B27/58
摘要： A combination of a focusing element, and a filtering element which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed through the focusing element as a function of wavelength, optionally as an element of an ellipsometer or polarimeter system.
摘要翻译： 聚焦元件和滤光元件的组合，其自然地调节作为波长的函数的通过聚焦元件的电磁辐射束的横截面积，可选地作为椭偏仪或偏振计系统的元件。
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3.发明授权Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权快速样品高度，AOI和POI校准在映射椭偏仪等公开(公告)号：US08436994B2
公开(公告)日：2013-05-07
申请号：US12930762
申请日：2011-01-15
IPC分类号： G01J4/00
CPC分类号： G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译： 与对准系统（AS）功能组合的样本调查系统（ES）以及启用校准和非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，具有 映射椭偏仪等应用。
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公开(公告)号：US20120314218A1
公开(公告)日：2012-12-13
申请号：US13573032
申请日：2012-08-15
申请人： Martin M. Liphardt , Ping He
发明人： Martin M. Liphardt , Ping He
IPC分类号： G01N21/47
CPC分类号： G01N21/211 , G02B26/0883 , G02B27/1073 , G02B27/143
摘要： A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.
摘要翻译： 一种允许目视观察由电磁波束进行调查的样品的系统和方法，以便与检测电磁辐射的样本波束一起被引起撞击的样本，与检测电磁波的样本束的数据检测器结合 它与样品相互作用后的辐射。
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公开(公告)号：US20120057158A1
公开(公告)日：2012-03-08
申请号：US13373037
申请日：2011-11-03
申请人： James N. Hilfiker , Jianing Sun , Ping He , Martin M. Liphardt
发明人： James N. Hilfiker , Jianing Sun , Ping He , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/213
摘要： System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively “regular” textured surface, and/or a surface characterized by an irregular array of faceted structures.
摘要翻译： 具有例如非随机有效的“规则”织构表面的样品的椭圆测量和椭圆曲线研究和分析方法和/或由不规则阵列的小平面结构表征的表面的系统和方法。
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公开(公告)号：US08130375B1
公开(公告)日：2012-03-06
申请号：US12462002
申请日：2009-07-28
IPC分类号： G01N1/10
CPC分类号： G01N21/211 , G01N21/0332 , G01N21/05 , G01N2021/0346 , G01N2021/054
摘要： A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.
摘要翻译： 具有流体入口的小的内部体积电池和出口端口，其中在与流体出口连续的流体路径中存在至少一个气泡阱。 进一步存在用于进入和退出电磁辐射的输入/输出孔径，其被定位成允许电磁辐射的输入束在其使用期间在其上的位置处撞击在样品基板上; 以及用于引导从所述样品基板反射并朝向和离开所述输入/输出孔的电磁辐射的反射镜; 以及其使用方法。
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7.发明授权公开(公告)号：US07907280B2
公开(公告)日：2011-03-15
申请号：US12290787
申请日：2008-11-04
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统 补偿光谱椭偏仪和/或偏振计系统。
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8.发明授权System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters 有权用于控制椭偏仪和偏光计中电磁辐射束强度的系统和方法公开(公告)号：US07830512B2
公开(公告)日：2010-11-09
申请号：US12075956
申请日：2008-03-14
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J3/02 , G01J3/0213 , G01J3/0224 , G01J4/00 , G02B27/281
摘要： An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
摘要翻译： 一种用于通过施加控制（P2）和光束（P）偏振器，可选地与中间和控制补偿器（C）组合来控制波长范围上的电磁束的强度的椭圆计或偏振计系统和方法。
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9.发明授权Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sample 有权在管状样品的内表面上的薄膜涂层的椭圆测量的非破坏性方法公开(公告)号：US07768660B1
公开(公告)日：2010-08-03
申请号：US11897401
申请日：2007-08-30
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/55
摘要： Disclosed is the use of a focused electromagnetic beam which is caused to impinge on the top surface of a tube shaped sample, to investigate a film coating on its inner surface during fabrication thereof and/or thereafter.
摘要翻译： 公开了使用被聚焦的电磁束撞击在管状样品的顶表面上，以在其制造期间和/或之后研究其内表面上的膜涂层。
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公开(公告)号：US07633625B1
公开(公告)日：2009-12-15
申请号：US11901225
申请日：2007-09-17
申请人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
发明人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
CPC分类号： G01J3/02 , G01J3/0213 , G01J3/0224 , G01J3/10 , G01N21/211 , G01N21/274 , G01N2021/213
摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
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