发明申请
- 专利标题: Nonvolatile memory device and method of manufacturing the same
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US12289297申请日: 2008-10-24
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公开(公告)号: US20090121277A1公开(公告)日: 2009-05-14
- 发明人: Tea-Kwang Yu , Jeong-Uk Han , Yong-Tae Kim
- 申请人: Tea-Kwang Yu , Jeong-Uk Han , Yong-Tae Kim
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 优先权: KR10-2007-0113790 20071108
- 主分类号: H01L27/115
- IPC分类号: H01L27/115
摘要:
The nonvolatile memory device includes a semiconductor substrate, and a device isolation layer defining an active region in the semiconductor substrate. The device isolation layer includes a top surface lower than a top surface of the semiconductor substrate, such that a side-upper surface of the active region is exposed. A sense line crosses both the active region and the device isolation layer, and a word line, spaced apart from the sense line, crosses both the active region and the device isolation layer.
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