发明申请
- 专利标题: Light-emitting discharge tube, method of fabricating the same, and protective film forming apparatus
- 专利标题(中): 发光放电管及其制造方法以及保护膜形成装置
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申请号: US12320125申请日: 2009-01-16
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公开(公告)号: US20090128038A1公开(公告)日: 2009-05-21
- 发明人: Hitoshi Yamada , Akira Tokai , Manabu Ishimoto , Yosuke Yamazaki , Kenji Awamoto , Koji Shinohe , Hitoshi Hirakawa
- 申请人: Hitoshi Yamada , Akira Tokai , Manabu Ishimoto , Yosuke Yamazaki , Kenji Awamoto , Koji Shinohe , Hitoshi Hirakawa
- 优先权: JPPCT/JP2003/013098 20031010
- 主分类号: H01J65/00
- IPC分类号: H01J65/00
摘要:
A light-emitting discharge tube in which an outer wall surface of a glass tube is made less susceptible to flaws by forming a protective film on the outer wall surface of the glass tube, a method of fabricating the light-emitting discharge tube, and a protective film forming apparatus are provided. The light-emitting discharge tube defines light-emitting discharge regions by a plurality of external electrodes. The outer wall surface of the light-emitting discharge tube (the glass tube) is coated with the protective film (a metal film, a conductive metal oxide film, an insulating metal oxide film, or an organic film).
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