Invention Application
US20090134448A1 Non-volatile memory device and method of forming the same 审中-公开
非易失性存储器件及其形成方法

Non-volatile memory device and method of forming the same
Abstract:
Example embodiments provide a non-volatile semiconductor memory device and method of forming the same. The non-volatile memory device may include a tunnel insulation layer on a semiconductor substrate, a charge storage layer on the tunnel insulation layer, a first blocking insulation layer on the charge storage layer, and a gate electrode on the first blocking insulation layer, wherein the gate electrode includes aluminum and the first blocking insulation layer does not include aluminum.
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