Invention Application
- Patent Title: Non-volatile memory device and method of forming the same
- Patent Title (中): 非易失性存储器件及其形成方法
-
Application No.: US12230835Application Date: 2008-09-05
-
Publication No.: US20090134448A1Publication Date: 2009-05-28
- Inventor: Taek-Soo Jeon , Si-Young Choi , In-Sang Jeon , Sang-Bom Kang , Si-Hyung Lee , Seung-Hoon Hong
- Applicant: Taek-Soo Jeon , Si-Young Choi , In-Sang Jeon , Sang-Bom Kang , Si-Hyung Lee , Seung-Hoon Hong
- Priority: KR10-2007-090615 20070906
- Main IPC: H01L29/68
- IPC: H01L29/68 ; H01L21/336

Abstract:
Example embodiments provide a non-volatile semiconductor memory device and method of forming the same. The non-volatile memory device may include a tunnel insulation layer on a semiconductor substrate, a charge storage layer on the tunnel insulation layer, a first blocking insulation layer on the charge storage layer, and a gate electrode on the first blocking insulation layer, wherein the gate electrode includes aluminum and the first blocking insulation layer does not include aluminum.
Information query
IPC分类: