发明申请
US20090135109A1 ORGANIC EL ELEMENT, ORGANIC EL DISPLAY DEVICE, AND METHODS OF MANUFACTURING THE SAME
审中-公开
有机EL元件,有机EL显示器件及其制造方法
- 专利标题: ORGANIC EL ELEMENT, ORGANIC EL DISPLAY DEVICE, AND METHODS OF MANUFACTURING THE SAME
- 专利标题(中): 有机EL元件,有机EL显示器件及其制造方法
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申请号: US12273745申请日: 2008-11-19
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公开(公告)号: US20090135109A1公开(公告)日: 2009-05-28
- 发明人: Tadahiro Ohmi , Tetsuya Goto , Takaaki Matsuoka
- 申请人: Tadahiro Ohmi , Tetsuya Goto , Takaaki Matsuoka
- 申请人地址: JP Miyagi JP Tokyo
- 专利权人: NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY,TOKYO ELECTRON LIMITED
- 当前专利权人: NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY,TOKYO ELECTRON LIMITED
- 当前专利权人地址: JP Miyagi JP Tokyo
- 优先权: JP2007-303205 20071122
- 主分类号: H01J1/62
- IPC分类号: H01J1/62 ; C23C14/35 ; G09G3/30
摘要:
In an organic EL element having a transparent conductive electrode and a cathode opposed to the transparent conductive electrode, the cathode includes a film of a rare earth element that can be sputtered. The film of the rare earth element having a low work function, for example, a LaB6 film, can be formed uniformly over a wide area on an electron injection layer by a rotary magnet sputtering apparatus.
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