发明申请
US20090137110A9 LOW FABRICATION COST, HIGH PERFORMANCE, HIGH RELIABILITY CHIP SCALE PACKAGE
有权
低制造成本,高性能,高可靠性芯片尺寸包装
- 专利标题: LOW FABRICATION COST, HIGH PERFORMANCE, HIGH RELIABILITY CHIP SCALE PACKAGE
- 专利标题(中): 低制造成本,高性能,高可靠性芯片尺寸包装
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申请号: US11930220申请日: 2007-10-31
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公开(公告)号: US20090137110A9公开(公告)日: 2009-05-28
- 发明人: Jin Yuan Lee , Ming Ta Lei , Ching-Cheng Huang , Chuen-Jye Lin
- 申请人: Jin Yuan Lee , Ming Ta Lei , Ching-Cheng Huang , Chuen-Jye Lin
- 申请人地址: TW Hsinchu
- 专利权人: MEGICA CORPORATION
- 当前专利权人: MEGICA CORPORATION
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L21/441
- IPC分类号: H01L21/441
摘要:
The invention provides a new method and chip scale package is provided. The inventions starts with a substrate over which a contact point is provided, the contact point is exposed through an opening created in the layer of passivation and a layer of polymer or elastomer. A barrier/seed layer is deposited, a first photoresist mask is created exposing the barrier/seed layer where this layer overlies the contact pad and, contiguous therewith, over a surface area that is adjacent to the contact pad and emanating in one direction from the contact pad. The exposed surface of the barrier/seed layer is electroplated for the creation of interconnect traces. The first photoresist mask is removed from the surface of the barrier/seed layer. A second photoresist mask, defining the solder bump, is created exposing the surface area of the barrier/seed layer that is adjacent to the contact pad and emanating in one direction from the contact pad. The solder bump is created in accordance with the second photoresist mask, the second photoresist mask is removed from the surface of the barrier/seed layer, exposing the electroplating and the barrier/seed layer with the metal plating overlying the barrier/seed layer. The exposed barrier/seed layer is etched in accordance with the pattern formed by the electroplating, reflow of the solder bump is optionally performed.
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