发明申请
- 专利标题: Interconnection element with plated posts formed on mandrel
- 专利标题(中): 具有在心轴上形成的电镀柱的互连元件
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申请号: US12228896申请日: 2008-08-15
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公开(公告)号: US20090148594A1公开(公告)日: 2009-06-11
- 发明人: Sean Moran , Jinsu Kwon , Kimitaka Endo
- 申请人: Sean Moran , Jinsu Kwon , Kimitaka Endo
- 申请人地址: US CA San Jose
- 专利权人: Tessera, Inc.
- 当前专利权人: Tessera, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: B05D5/12
- IPC分类号: B05D5/12
摘要:
An interconnection element can be formed by plating a metal layer within holes in an essentially non-metallic layer of a mandrel, wherein posts can be plated onto a metal layer exposed within the holes, e.g., a metal layer covering the holes in the non-metallic layer. The tips of the posts can be formed adjacent to ends or bottoms of the blind holes. Terminals can be formed in conductive communication with the conductive posts. The terminals can be connected through a dielectric layer to the conductive posts. At least a portion of the mandrel can then be removed from at least ends of the holes. In this way, the tips of the conductive posts can become raised above a major surface of the interconnection element such that at least the tips of the posts project beyond the major surface.
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