发明申请
- 专利标题: MICRO GAS SENSOR AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 微气体传感器及其制造方法
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申请号: US12142695申请日: 2008-06-19
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公开(公告)号: US20090151429A1公开(公告)日: 2009-06-18
- 发明人: Chi Hoon JUN , Sang Choon KO , Moon Youn JUNG , Seon Hee PARK
- 申请人: Chi Hoon JUN , Sang Choon KO , Moon Youn JUNG , Seon Hee PARK
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2007-131984 20071217
- 主分类号: G01N9/00
- IPC分类号: G01N9/00 ; H01L21/00
摘要:
Provided is a micro gas sensor including: a substrate; an open cavity and electrode pad separation grooves formed on the substrate; a plurality of electrode pads formed on an upper portion of the substrate and electrically insulated from each other by the electrode pad separation grooves; a micro heater connected to a plurality of the electrode pads by a bridge structure and suspended on the open cavity; a plurality of sensing electrodes formed on the same plane between the micro heater and a plurality of the electrode pads in a cantilever array and suspended on the open cavity; and a gas sensing film formed to be hung down between microelectrode finger spacings of a plurality of the sensing electrodes to represent changes in characteristics according to a gas concentration by contacting surfaces of the micro heater and a plurality of the sensing electrodes. Therefore, the micro gas sensor can have low power consumption, a rapid heating and cooling time, high durability, high sensitivity characteristics, and a capability of easily forming a gas sensing film by using various materials. In addition, the micro gas sensor can be miniaturized and mass-produced at low cost in a simple structure using only a single pattern mask.
公开/授权文献
- US07861575B2 Micro gas sensor and manufacturing method thereof 公开/授权日:2011-01-04
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