公开(公告)号：US08664833B2

公开(公告)日：2014-03-04

申请号：US13288988

申请日：2011-11-04

申请人： Sang Choon Ko ,  Chi Hoon Jun

发明人： Sang Choon Ko ,  Chi Hoon Jun

IPC分类号： H02N2/18

CPC分类号： B60C23/0411 ,  H01L41/1134 ,  H01L41/25 ,  H02N2/186

摘要： Disclosed are a slim self-powering power supplier using a flexible PCB for a wireless sensor network and a sensor node using the same, and a fabrication method thereof. An exemplary embodiment of the present disclosure provides a self-powering power supplier including: a flexible PCB; a lower electrode positioned on the flexible PCB; a piezoelectric body having a cantilever structure deposited on the lower electrode; and an upper electrode formed on the piezoelectric body.

摘要翻译： 公开了一种使用用于无线传感器网络的柔性PCB和使用其的传感器节点的纤薄的自供电电源及其制造方法。 本公开的示例性实施例提供了一种自供电电源，包括：柔性PCB; 位于柔性PCB上的下电极; 具有沉积在下电极上的悬臂结构的压电体; 以及形成在压电体上的上电极。

公开(公告)号：US08598768B2

公开(公告)日：2013-12-03

申请号：US13316590

申请日：2011-12-12

申请人： Chi Hoon Jun ,  Sang Choon Ko ,  Jong Tae Moon

发明人： Chi Hoon Jun ,  Sang Choon Ko ,  Jong Tae Moon

IPC分类号： H01L41/08

CPC分类号： H01L41/29 ,  H01L41/1136 ,  H01L41/31 ,  H01L41/316 ,  H01L41/317 ,  H01L41/318 ,  H02N2/188 ,  Y10T29/42

摘要： Disclosed is a piezoelectric micro energy harvester and manufacturing method thereof, the method including: forming an insulation film on a substrate; patterning the insulation film and forming an electrode pad pattern, a center electrode pattern, and a side electrode pattern; forming an open cavity at an inside of the substrate for suspension of the center electrode pattern and the side electrode pattern; disposing a conductive film on the electrode pad pattern, the center electrode pattern, and the side electrode pattern and forming electrode pads, a center electrode, and a side electrode; and forming a piezoelectric film so as to cover a space between the center electrode and the side electrode and upper surfaces of the center electrode and the side electrode.

摘要翻译： 公开了一种压电微能量收集器及其制造方法，该方法包括：在基板上形成绝缘膜; 图案化绝缘膜并形成电极焊盘图案，中心电极图案和侧面电极图案; 在所述基板的内部形成开放空腔，以悬浮所述中心电极图案和所述侧面电极图案; 在电极焊盘图形，中心电极图案和侧面电极图案上设置导电膜，形成电极焊盘，中心电极和侧面电极; 以及形成压电膜以覆盖中心电极和侧电极之间的空间以及中心电极和侧电极的上表面。

公开(公告)号：US08263426B2

公开(公告)日：2012-09-11

申请号：US12509360

申请日：2009-07-24

申请人： Sang Choon Ko ,  Chi Hoon Jun ,  Byoung Gon Yu ,  Chang Auck Choi

发明人： Sang Choon Ko ,  Chi Hoon Jun ,  Byoung Gon Yu ,  Chang Auck Choi

IPC分类号： H01L21/00

CPC分类号： G01P15/0802 ,  G01H11/06 ,  G01P1/023 ,  G01P15/125 ,  H04R19/005

摘要： Provided is a high-sensitivity MEMS-type z-axis vibration sensor, which may sense z-axis vibration by differentially shifting an electric capacitance between a doped upper silicon layer and an upper electrode from positive to negative or vice versa when center mass of a doped polysilicon layer is moved due to z-axis vibration. Particularly, since a part of the doped upper silicon layer is additionally connected to the center mass of the doped polysilicon layer, and thus an error made by the center mass of the doped polysilicon layer is minimized, it may sensitively respond to weak vibration of low frequency such as seismic waves. Accordingly, since the high-sensitivity MEMS-type z-axis vibration sensor sensitively responds to a small amount of vibration in a low frequency band, it can be applied to a seismograph sensing seismic waves of low frequency which have a very small amount of vibration and a low vibration speed. Moreover, since the high-sensitivity MEMS-type z-axis vibration sensor has a higher vibration sensibility than MEMS-type z-axis vibration sensor of the same size, it can be useful in electronic devices which are gradually decreasing in size.

摘要翻译： 提供了一种高灵敏度的MEMS型z轴振动传感器，其可以通过将掺杂的上硅层和上电极之间的电容从正向或者反向偏移来感测z轴振动，当中心质量为 掺杂多晶硅层由于z轴振动而移动。 特别地，由于掺杂的上硅层的一部分另外连接到掺杂多晶硅层的中心质量块，因此由掺杂多晶硅层的中心质量造成的误差最小化，可以敏感地响应低的振动弱 频率如地震波。 因此，由于高灵敏度的MEMS型z轴振动传感器对低频带中的少量振动敏感地作出响应，因此可以应用于地震仪中，以便感测具有极小振动频率的低频地震波 和低振动速度。 此外，由于高灵敏度的MEMS型z轴振动传感器具有比相同尺寸的MEMS型z轴振动传感器更高的振动灵敏度，所以在逐渐减小的电子设备中是有用的。

公开(公告)号：US20120153778A1

公开(公告)日：2012-06-21

申请号：US13316590

申请日：2011-12-12

申请人： Chi Hoon JUN ,  Sang Choon KO ,  Jong Tae MOON

发明人： Chi Hoon JUN ,  Sang Choon KO ,  Jong Tae MOON

IPC分类号： H02N2/18 ,  H01L41/22

CPC分类号： H01L41/29 ,  H01L41/1136 ,  H01L41/31 ,  H01L41/316 ,  H01L41/317 ,  H01L41/318 ,  H02N2/188 ,  Y10T29/42

摘要： Disclosed is a piezoelectric micro energy harvester and manufacturing method thereof, the method including: forming an insulation film on a substrate; patterning the insulation film and forming an electrode pad pattern, a center electrode pattern, and a side electrode pattern; forming an open cavity at an inside of the substrate for suspension of the center electrode pattern and the side electrode pattern; disposing a conductive film on the electrode pad pattern, the center electrode pattern, and the side electrode pattern and forming electrode pads, a center electrode, and a side electrode; and forming a piezoelectric film so as to cover a space between the center electrode and the side electrode and upper surfaces of the center electrode and the side electrode.

摘要翻译： 公开了一种压电微能量收集器及其制造方法，该方法包括：在基板上形成绝缘膜; 图案化绝缘膜并形成电极焊盘图案，中心电极图案和侧面电极图案; 在所述基板的内部形成开放空腔，以悬浮所述中心电极图案和所述侧面电极图案; 在电极焊盘图形，中心电极图案和侧面电极图案上设置导电膜，形成电极焊盘，中心电极和侧面电极; 以及形成压电膜以覆盖中心电极和侧电极之间的空间以及中心电极和侧电极的上表面。

公开(公告)号：US20090151429A1

公开(公告)日：2009-06-18

申请号：US12142695

申请日：2008-06-19

申请人： Chi Hoon JUN ,  Sang Choon KO ,  Moon Youn JUNG ,  Seon Hee PARK

发明人： Chi Hoon JUN ,  Sang Choon KO ,  Moon Youn JUNG ,  Seon Hee PARK

IPC分类号： G01N9/00 ,  H01L21/00

CPC分类号： G01N33/0027 ,  G01N27/128

摘要： Provided is a micro gas sensor including: a substrate; an open cavity and electrode pad separation grooves formed on the substrate; a plurality of electrode pads formed on an upper portion of the substrate and electrically insulated from each other by the electrode pad separation grooves; a micro heater connected to a plurality of the electrode pads by a bridge structure and suspended on the open cavity; a plurality of sensing electrodes formed on the same plane between the micro heater and a plurality of the electrode pads in a cantilever array and suspended on the open cavity; and a gas sensing film formed to be hung down between microelectrode finger spacings of a plurality of the sensing electrodes to represent changes in characteristics according to a gas concentration by contacting surfaces of the micro heater and a plurality of the sensing electrodes. Therefore, the micro gas sensor can have low power consumption, a rapid heating and cooling time, high durability, high sensitivity characteristics, and a capability of easily forming a gas sensing film by using various materials. In addition, the micro gas sensor can be miniaturized and mass-produced at low cost in a simple structure using only a single pattern mask.

摘要翻译： 提供一种微气体传感器，包括：基板; 形成在所述基板上的开放空腔和电极焊盘分离槽; 多个电极焊盘，其形成在所述基板的上部并且由所述电极焊盘分离槽彼此电绝缘; 微加热器，其通过桥结构连接到多个电极焊盘并悬挂在所述开放空腔上; 多个感测电极，形成在微加热器和悬臂式悬臂之间的多个电极焊盘的同一平面上; 以及气体传感膜，其被形成为悬挂在多个感测电极的微电极指间隔之间，以通过接触微加热器的表面和多个感测电极来表示根据气体浓度的特性变化。 因此，微气体传感器可以具有低功耗，快速的加热和冷却时间，高耐久性，高灵敏度特性，以及通过使用各种材料容易地形成气体感测膜的能力。 此外，微型气体传感器可以在仅使用单一图案掩模的简单结构中以低成本小型化和批量生产。

公开(公告)号：US07209608B2

公开(公告)日：2007-04-24

申请号：US10923838

申请日：2004-08-24

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

IPC分类号： G02B6/28 ,  G02B6/36 ,  G02B27/00 ,  G02B1/10 ,  G02B5/28

CPC分类号： G02B26/001 ,  G02B2006/12109

摘要： Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.

摘要翻译： 提供了一种法布里 - 珀罗型波长可调谐滤光器，包括第一反射镜; 位于第一镜上的第二镜; 位于所述第一反射镜上方的驱动体，并且其两端通过间隔件固定到所述第一反射镜; 多个电极，各自形成在所述驱动体的两端; 连接驱动体的中心和第二反射镜的杆结构; 多个固定装置，每个固定装置通过间隔件固定到杆结构的两侧的第一反射镜; 以及多个弹性体，其将所述杆结构与所述多个固定装置连接并用作旋转轴线。 并且当由作为电热膨胀，电磁力或外力产生翘曲时，作为具有弹性体作为旋转轴的杠杆的杆结构驱动反射镜。 从而可以在更大的波长可调范围和低功耗范围内驱动反射镜。

公开(公告)号：US06947656B2

公开(公告)日：2005-09-20

申请号：US10412580

申请日：2003-04-14

申请人： Chang-Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Youn Tae Kim

发明人： Chang-Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Youn Tae Kim

IPC分类号： G02B26/02 ,  G02B6/26 ,  G02B6/34 ,  G02B6/35 ,  G02B6/00

CPC分类号： G02B6/352 ,  G02B6/266 ,  G02B6/29358 ,  G02B6/29389 ,  G02B6/29395 ,  G02B6/3514 ,  G02B6/3552 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3594

摘要： A variable optical attenuator with tunable wavelength selectivity includes at least two reflectors disposed parallel to each other at a predetermined angle from an optic axis and driving units connected to said at least two reflectors for allowing the reflectors to move back and forth in a direction perpendicular or parallel to the optic axis or to revolve centering on an axis perpendicular or parallel to the optic axis. Since the variable optical attenuator of the present invention serves as a variable optical attenuator and, at the same time, as a tunable wavelength filter, problems of insertion loss and optical alignment that might be caused by separately installing a variable optical attenuator and a wavelength filter can be effectively prevented. Moreover, by implementing the variable optical attenuator and the tunable wavelength filter by using a single device, the size of a system using the optical attenuator can be reduced.

公开(公告)号：US06791731B2

公开(公告)日：2004-09-14

申请号：US10329702

申请日：2002-12-27

申请人： Ho Jun Ryu ,  Doo Young Hah ,  Chi Hoon Jun ,  Yun Tae Kim

发明人： Ho Jun Ryu ,  Doo Young Hah ,  Chi Hoon Jun ,  Yun Tae Kim

IPC分类号： G02B2608

CPC分类号： G02B26/085 ,  Y10S359/90

摘要： The present invention relates to a micro-optical switch and comprises an external frame having a plurality of holes inside; an internal frame positioned in the plurality of holes and having holes inside; light reflecting means positioned inside the holes of the internal frame; external magnetic substances positioned at both sides of the external frame; outside torsion hinge for connecting the external frame to the internal frame and having 45° to the magnetic field produced by the external magnetic substances; inside torsion hinge for connecting the internal frame to the light reflecting means and for being perpendicular to said outside torsion hinge; an outside coil wired in the internal frame; and an inside coil wired in the light reflecting means, and is characterized in that the light reflecting means and the internal frame are preferably rotated by the inside torsion hinge and the outside torsion hinge as an axis when a current is applied to the inside coil and the outside coil.

摘要翻译： 微型光开关技术领域本发明涉及一种微型光开关，其包括：内部具有多个孔的外框; 定位在所述多个孔中并在其内部具有孔的内部框架; 位于内部框架的孔内的光反射装置; 位于外框架两侧的外部磁性物质; 外部扭转铰链，用于将外部框架连接到内部框架，并且与由外部磁性物质产生的磁场成45°; 内部扭转铰链，用于将内部框架连接到光反射装置并且用于垂直于所述外部扭转铰链; 外部线圈连接在内部框架中; 以及布线在光反射装置中的内部线圈，其特征在于，当电流施加到内侧线圈时，光反射装置和内部框架优选地通过内部扭转铰链和外部扭转铰链作为轴线旋转， 外线圈。

公开(公告)号：US06342427B1

公开(公告)日：2002-01-29

申请号：US09473968

申请日：1999-12-29

申请人： Chang Auck Choi ,  Chi Hoon Jun ,  Won Ick Jang ,  Yun Tae Kim

发明人： Chang Auck Choi ,  Chi Hoon Jun ,  Won Ick Jang ,  Yun Tae Kim

IPC分类号： H01L2100

CPC分类号： B81C1/00047 ,  B81B2203/033 ,  B81C2201/0133 ,  B81C2201/0178 ,  B81C2203/0136

摘要： A method for forming a micro cavity is disclosed. In the method for forming the cavity, a first layer is formed on a silicon layer and a trench is formed in the silicon layer by selectively etching the silicon layer. A second and a third layers are formed on the trench and on the silicon layer. Etching holes are formed through the third layer by partially etching the third layer. A cavity is formed between the silicon layer and the third layer after the second layer is removed through the etching holes. Therefore, the cavity having a large size can be easily formed and sealed in the silicon layer by utilizing the volume expansion of the silicon or the poly silicon layer. Also, a vacuum micro cavity can be formed according as a low vacuum CVD oxide layer or a nitride layer formed on the etching holes which are partially opened after the thermal oxidation process by controlling the size of the etching holes concerning the other portion of the poly silicon layer.

摘要翻译： 公开了一种用于形成微腔的方法。 在形成空腔的方法中，在硅层上形成第一层，并且通过选择性地蚀刻硅层，在硅层中形成沟槽。 在沟槽和硅层上形成第二和第三层。 通过部分地蚀刻第三层，通过第三层形成蚀刻孔。 在通过蚀刻孔除去第二层之后，在硅层和第三层之间形成空穴。 因此，通过利用硅或多晶硅层的体积膨胀，可以容易地在硅层中形成并密封具有大尺寸的空腔。 此外，可以根据在热氧化处理后部分打开的蚀刻孔上形成的低真空CVD氧化物层或氮化物层，通过控制与聚合物的其它部分相关的蚀刻孔的尺寸，形成真空微腔 硅层。

公开(公告)号：US20110140578A1

公开(公告)日：2011-06-16

申请号：US12862577

申请日：2010-08-24

申请人： Sang Choon Ko ,  Chang Han Je ,  Ho Jun Ryu ,  Sung Sik Lee ,  Chi Hoon Jun

发明人： Sang Choon Ko ,  Chang Han Je ,  Ho Jun Ryu ,  Sung Sik Lee ,  Chi Hoon Jun

IPC分类号： H02N2/18

CPC分类号： H01L41/1138 ,  B60C23/0411 ,  H01L41/1136 ,  H02N2/186

摘要： Provided is a small piezoelectric power generator applied to a wireless sensor network system of a tire pressure monitoring system (TPMS) for monitoring an internal environment of a tire such as variation in air pressure in the tire. In particular, when the system, in which air pressure, temperature and acceleration sensors are mounted, installed in the tire is operated in the TPMS for an automobile, a small piezoelectric power generator for the TPMS can be used as a power source in place of a conventional battery. The piezoelectric power generator includes a substrate having an electrode for transmitting power to the exterior, a metal plate formed on the substrate, and a piezoelectric body disposed on the metal plate and transmitting the power generated by a piezoelectric material to the electrode.

摘要翻译： 提供了一种应用于轮胎压力监测系统（TPMS）的无线传感器网络系统的小型压电发电机，用于监测轮胎的内部环境，例如轮胎中的空气压力的变化。 特别地，当安装在轮胎中的气压，温度和加速度传感器的系统在用于汽车的TPMS中运行时，用于TPMS的小压电发电机可以用作电源来代替 常规电池。 压电发电机包括具有用于向外部传输电力的电极的基板，形成在基板上的金属板，以及设置在金属板上的压电体，并将由压电材料产生的电力传递到电极。