发明申请
US20090152958A1 VACUUM SEALING RADIO FREQUENCY (RF) AND LOW FREQUENCY CONDUCTING ACTUATOR
有权
真空密封无线电频率(RF)和低频导频执行器
- 专利标题: VACUUM SEALING RADIO FREQUENCY (RF) AND LOW FREQUENCY CONDUCTING ACTUATOR
- 专利标题(中): 真空密封无线电频率(RF)和低频导频执行器
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申请号: US12333819申请日: 2008-12-12
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公开(公告)号: US20090152958A1公开(公告)日: 2009-06-18
- 发明人: Danny Brown , Allan Ronne , Arthur Sato , John Daugherty , Leonard Sharpless
- 申请人: Danny Brown , Allan Ronne , Arthur Sato , John Daugherty , Leonard Sharpless
- 申请人地址: US CA Fremont
- 专利权人: LAM Research Corporation
- 当前专利权人: LAM Research Corporation
- 当前专利权人地址: US CA Fremont
- 主分类号: H02K41/02
- IPC分类号: H02K41/02
摘要:
A linear actuator comprised of an actuator body having a first portion and a second portion, each arranged along a longitudinal axis of the actuator body. A vacuum bellows is concentrically located in the first portion and is configured to seal a vacuum environment from the second portion. A linear motion shaft is concentrically located substantially within the actuator body and is configured to move in a linear direction along the longitudinal axis. An electrically conductive portion of the shaft is concentrically located substantially within the vacuum bellows and electrically insulated therefrom and is configured to receive and conduct a signal. A lift force generating portion of the shaft is concentrically located substantially within the second portion. An electrical contact pad is electrically coupled to the conductive portion of the shaft and is configured to couple the signal to another surface upon activation of the shaft.
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