发明申请
US20090154240A1 NAND FLASH MEMORY DEVICES HAVING WIRING WITH INTEGRALLY-FORMED CONTACT PADS AND DUMMY LINES AND METHODS OF MANUFACTURING THE SAME
有权
具有整体形成的接触垫和连接线的接线的NAND闪存存储器件及其制造方法
- 专利标题: NAND FLASH MEMORY DEVICES HAVING WIRING WITH INTEGRALLY-FORMED CONTACT PADS AND DUMMY LINES AND METHODS OF MANUFACTURING THE SAME
- 专利标题(中): 具有整体形成的接触垫和连接线的接线的NAND闪存存储器件及其制造方法
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申请号: US12240529申请日: 2008-09-29
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公开(公告)号: US20090154240A1公开(公告)日: 2009-06-18
- 发明人: Jang-ho Park , Jae-kwan Park , Dong-hwa Kwak , So-wi Jin , Byung-jun Hwang , Nam-su Lim
- 申请人: Jang-ho Park , Jae-kwan Park , Dong-hwa Kwak , So-wi Jin , Byung-jun Hwang , Nam-su Lim
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2007-0132606 20071217
- 主分类号: G11C16/04
- IPC分类号: G11C16/04 ; H01L21/336 ; G11C5/02
摘要:
A NAND flash memory device includes a plurality of continuous conductors disposed on a common level of a multilayer substrate, the plurality of continuous conductors including respective conductive lines extending in parallel along a first direction, respective contact pads disposed at ends of the respective conductive lines and respective conductive dummy lines extending in parallel from the contact pads along a second direction
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