发明申请
US20090154642A1 System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus 有权
系统管理极紫外(EUV)光刻设备的腔室之间的气流

System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus
摘要:
A gas flow management system may comprise a first and second enclosing walls at least partially surrounding first and second respective spaces; a system generating plasma in the first space, the plasma emitting extreme ultraviolet light; an elongated body restricting flow from the first space to the second space, the body at least partially surrounding a passageway and having a first open end allowing EUV light to enter the passageway from the first space and a second open end allowing EUV light to exit the passageway into the second space, the body shaped to establish a location having a reduced cross-sectional area relative to the first and second ends; and a flow of gas exiting an aperture, the aperture positioned to introduce gas into the passageway at a position between the first end of the body and the location having a reduced cross-sectional area.
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