发明申请
- 专利标题： MAINTENANCE SYSTEM, SUBSTRATE PROCESSING APPARATUS, REMOTE OPERATION UNIT AND COMMUNICATION METHOD
- 专利标题（中）： 维护系统，基板处理设备，远程操作单元和通信方法
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申请号： US12372347申请日： 2009-02-17
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公开(公告)号： US20090157214A1公开(公告)日： 2009-06-18
- 发明人: Takuya Mori
- 申请人： Takuya Mori
- 申请人地址： JP Tokyo
- 专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人地址： JP Tokyo
- 优先权： JP2002-247525 20020827
- 主分类号： G06F19/00
- IPC分类号： G06F19/00 ; B05C11/00 ; C23F1/08
摘要：
An object of the present invention is to maintain a coating and developing system by remotely operating it more safely.The present invention is a maintenance system of a substrate processing apparatus, including a remote operation unit for operating the substrate processing apparatus from a remote place by transmitting a remote operation information to a side of the substrate processing apparatus through a communication network and providing the remote operation information to the substrate processing apparatus, and a communication control unit for receiving the remote operation information transmitted to the side of the substrate processing apparatus and providing the remote operation information to the substrate processing apparatus. The communication control unit provides the remote operation information to the substrate processing apparatus only when there is an allow setting for the remote operation by a worker in the side of the substrate processing apparatus.