发明申请
- 专利标题： Micro mirror device
- 专利标题（中）： 微镜装置
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申请号： US12378655申请日： 2009-02-18
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公开(公告)号： US20090161198A1公开(公告)日： 2009-06-25
- 发明人: Fusao Ishii , Naoya Sugimoto , Hirotoshi Ichikawa , Yoshihiro Maeda
- 申请人： Fusao Ishii , Naoya Sugimoto , Hirotoshi Ichikawa , Yoshihiro Maeda
- 主分类号： G02F1/31
- IPC分类号： G02F1/31
摘要：
The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance.
公开/授权文献
- US07755830B2 Micro mirror device 公开/授权日：2010-07-13
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