Micro mirror device
    1.
    发明授权
    Micro mirror device 失效
    微镜装置

    公开(公告)号:US07760415B2

    公开(公告)日:2010-07-20

    申请号:US12378658

    申请日:2009-02-18

    IPC分类号: G02B26/00 G02B26/08

    摘要: The present invention provides a mirror device, comprising: a mirror; an elastic hinge for supporting the mirror and the elastic hinge has a specific electric resistance. The mirror device further includes an electrode for controlling the mirror, wherein a voltage is applied to the elastic hinge for a predetermined period in synchronous with a change of an electric voltage applied to the electrode.

    摘要翻译: 本发明提供了一种镜装置,包括:反射镜; 用于支撑反射镜和弹性铰链的弹性铰链具有比电阻。 反射镜装置还包括用于控制反射镜的电极,其中与施加到电极的电压的变化同步地,电压被施加到弹性铰链一段预定时间段。

    Micro mirror device
    2.
    发明授权
    Micro mirror device 有权
    微镜装置

    公开(公告)号:US07755830B2

    公开(公告)日:2010-07-13

    申请号:US12378655

    申请日:2009-02-18

    IPC分类号: G02B26/00 G02B26/08

    CPC分类号: G02B26/0833

    摘要: The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance.

    摘要翻译: 本发明提供了一种镜装置,包括:放置在基板上的电极; 连接到电极的存储电路; 弹性铰链,设置在所述电极附近并且从所述基板延伸,用于支撑所述电极上方的反射镜,其中所述弹性铰链具有负的温度系数电阻。

    Mirror device
    3.
    发明授权
    Mirror device 有权
    镜像设备

    公开(公告)号:US07652813B2

    公开(公告)日:2010-01-26

    申请号:US12220770

    申请日:2008-07-28

    IPC分类号: G02B26/00 G02B26/08

    CPC分类号: G02B26/0841

    摘要: A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.

    摘要翻译: 镜装置包括:电极,被覆有由含有半导体材料的材料制成的保护膜并放置在基板上; 放在电极上方的镜子; 以及放置在反射镜和电极之间的导电铰链,其中开口部分形成在保护膜的一部分中,并且铰链在其开口部分中穿透保护膜。

    Micro mirror device
    4.
    发明申请
    Micro mirror device 失效
    微镜装置

    公开(公告)号:US20090207474A1

    公开(公告)日:2009-08-20

    申请号:US12378658

    申请日:2009-02-18

    IPC分类号: G02F1/19

    摘要: The present invention provides a mirror device, comprising: a mirror; an elastic hinge for supporting the mirror and the elastic hinge has a specific electric resistance. The mirror device further includes an electrode for controlling the mirror, wherein a voltage is applied to the elastic hinge for a predetermined period in synchronous with a change of an electric voltage applied to the electrode.

    摘要翻译: 本发明提供了一种镜装置,包括:反射镜; 用于支撑反射镜和弹性铰链的弹性铰链具有比电阻。 反射镜装置还包括用于控制反射镜的电极,其中与施加到电极的电压的变化同步地,电压被施加到弹性铰链一段预定时间段。

    Mirror device and MEMS device comprising layered electrode
    6.
    发明授权
    Mirror device and MEMS device comprising layered electrode 有权
    镜装置和包括层状电极的MEMS装置

    公开(公告)号:US08064123B2

    公开(公告)日:2011-11-22

    申请号:US12590053

    申请日:2009-10-30

    IPC分类号: G02B26/00 G02B26/08

    摘要: The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.

    摘要翻译: 本发明提供了一种利用形成并支撑在用作空间光调制器的衬底上的微机电系统(MEMS)器件实现的图像显示系统,其中MEMS器件还包括设置在衬底上的驱动电路; 用作可移动电极的微镜,其支撑在从基板延伸的可偏转铰链上; 固定电极,其设置在所述基板上并连接到所述驱动电路以从其接收信号,其中所述固定电极包括第一电极,第二电极和绝缘层,其中所述绝缘层设置在所述第一电极和第二电极之间。

    Three states of micro mirror device
    7.
    发明申请
    Three states of micro mirror device 有权
    微镜装置的三种状态

    公开(公告)号:US20090201568A1

    公开(公告)日:2009-08-13

    申请号:US12378656

    申请日:2009-02-18

    IPC分类号: G02F1/31

    CPC分类号: G02B26/0833

    摘要: The present invention provides a spatial light modulator, comprising a mirror modulating a light emitted from a light source, wherein the mirror is further controlled to operate with at least three stationary states whereby an image is projected with a gray scale expression through a combination of modulation of the light operated in the three stationary states.

    摘要翻译: 本发明提供了一种空间光调制器,其包括调制从光源发出的光的反射镜,其中所述反射镜被进一步控制为以至少三个静止状态操作,由此通过调制的组合以灰度表达式投射图像 的光在三个固定状态下运行。

    Micro mirror device
    8.
    发明申请
    Micro mirror device 有权
    微镜装置

    公开(公告)号:US20090161198A1

    公开(公告)日:2009-06-25

    申请号:US12378655

    申请日:2009-02-18

    IPC分类号: G02F1/31

    CPC分类号: G02B26/0833

    摘要: The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance.

    摘要翻译: 本发明提供了一种镜装置,包括:放置在基板上的电极; 连接到电极的存储电路; 弹性铰链,设置在所述电极附近并且从所述基板延伸,用于支撑所述电极上方的反射镜,其中所述弹性铰链具有负的温度系数电阻。

    Three states of micro mirror device
    9.
    发明授权
    Three states of micro mirror device 有权
    微镜装置的三种状态

    公开(公告)号:US07933060B2

    公开(公告)日:2011-04-26

    申请号:US12378656

    申请日:2009-02-18

    IPC分类号: G02B26/00 G02B26/08

    CPC分类号: G02B26/0833

    摘要: The present invention provides a spatial light modulator, comprising a mirror modulating a light emitted from a light source, wherein the mirror is further controlled to operate with at least three stationary states whereby an image is projected with a gray scale expression through a combination of modulation of the light operated in the three stationary states.

    摘要翻译: 本发明提供了一种空间光调制器,其包括调制从光源发出的光的反射镜,其中所述反射镜被进一步控制为以至少三个静止状态操作,由此通过调制的组合以灰度表达式投射图像 的光在三个固定状态下运行。

    Micromirror device having a vertical hinge
    10.
    发明授权
    Micromirror device having a vertical hinge 有权
    具有垂直铰链的微反射镜装置

    公开(公告)号:US07911680B2

    公开(公告)日:2011-03-22

    申请号:US12378938

    申请日:2009-02-20

    IPC分类号: G02B26/00 G02B26/08

    CPC分类号: G02B26/0833

    摘要: A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes. The mirror device further comprises a barrier layer is disposed between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Furthermore, this invention discloses a projection apparatus implemented with a mirror device manufactured and assembled according to the configuration as described.

    摘要翻译: 镜装置包括:设置在基板上的多个电极; 连接到至少一个所述电极的铰链; 连接到铰链并对应于至少一个电极的反射镜。 反射镜装置还包括位于铰链和反射镜之间和/或铰链和电极之间的阻挡层。 还注意到用于制造这种配置的反射镜装置的镜装置制造方法。 此外,本发明公开了一种投影装置,其具有根据上述结构制造和组装的反射镜装置。