Invention Application
US20090169845A1 STRUCTURAL MATERIAL OF DIAMOND LIKE CARBON COMPOSITE LAYERS AND METHOD OF MANUFACTURING THE SAME
有权
金刚石的结构材料与碳复合层的制造方法及其制造方法
- Patent Title: STRUCTURAL MATERIAL OF DIAMOND LIKE CARBON COMPOSITE LAYERS AND METHOD OF MANUFACTURING THE SAME
- Patent Title (中): 金刚石的结构材料与碳复合层的制造方法及其制造方法
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Application No.: US12046455Application Date: 2008-03-12
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Publication No.: US20090169845A1Publication Date: 2009-07-02
- Inventor: Ming-Sheng Leu , Jin-Bao Wu , Jia-Jen Chang
- Applicant: Ming-Sheng Leu , Jin-Bao Wu , Jia-Jen Chang
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Priority: TW96151043 20071228
- Main IPC: B32B9/00
- IPC: B32B9/00 ; C23C14/32 ; C23C14/00
Abstract:
A structural material of diamond like carbon (DLC) composite layers is provided. The structural material includes a composite material which is consisted of a metal layer, a first metal nitride layer, and a DLC thin film. The metal layer includes aluminum (Al), copper (Cu), zirconium (Zr), nickel (Ni), or vanadium (V). The first metal nitride layer includes aluminum nitride (Al—N), zirconium nitride (Zr—N), vanadium nitride (V—N), or nickel nitride (Ni—N). The DLC thin film of the structural material of DLC composite layers has high quality tetragonally bonded amorphous carbon (ta-C) with a sp3(C—C) bonding ratio of more than 30%. Therefore, it is suitable for the work pieces in the mechanical, chemical, electricity, photoelectric, and heat transfer fields.
Public/Granted literature
- US07816011B2 Structural material of diamond like carbon composite layers Public/Granted day:2010-10-19
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