发明申请
- 专利标题: BONDING STRUCTURE AND SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS
- 专利标题(中): 粘结结构和半导体器件制造设备
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申请号: US12349682申请日: 2009-01-07
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公开(公告)号: US20090173448A1公开(公告)日: 2009-07-09
- 发明人: Tomoyuki FUJII , Taichi Nakamura , Hiroshi Takebayashi
- 申请人: Tomoyuki FUJII , Taichi Nakamura , Hiroshi Takebayashi
- 申请人地址: JP Nagoya-Shi
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya-Shi
- 优先权: JP2008-001364 20080108; JP2009-001191 20090106
- 主分类号: B32B37/00
- IPC分类号: B32B37/00
摘要:
The present invention relates to a bonding structure, including: a ceramic member including a hole; a terminal embedded in the ceramic member, an exposed surface exposed to a bottom portion of the hole, and made of a refractory metal having a thermal expansion coefficient substantially equal to a thermal expansion coefficient of the ceramic member; a brazed bond layer including a first tantalum layer in contact with the exposed surface of the terminal, a gold layer formed on the first tantalum layer, and a second tantalum layer formed on the gold layer; and a connecting member inserted in the hole, bonded to the terminal via the brazed bond layer, and made of a refractory metal having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the ceramic member.
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