发明申请
US20090173448A1 BONDING STRUCTURE AND SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS 有权
粘结结构和半导体器件制造设备

BONDING STRUCTURE AND SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS
摘要:
The present invention relates to a bonding structure, including: a ceramic member including a hole; a terminal embedded in the ceramic member, an exposed surface exposed to a bottom portion of the hole, and made of a refractory metal having a thermal expansion coefficient substantially equal to a thermal expansion coefficient of the ceramic member; a brazed bond layer including a first tantalum layer in contact with the exposed surface of the terminal, a gold layer formed on the first tantalum layer, and a second tantalum layer formed on the gold layer; and a connecting member inserted in the hole, bonded to the terminal via the brazed bond layer, and made of a refractory metal having a thermal expansion coefficient substantially equal to the thermal expansion coefficient of the ceramic member.
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