发明申请
- 专利标题: SEMICONDUCTOR MEMORY DEVICE
- 专利标题(中): 半导体存储器件
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申请号: US12339814申请日: 2008-12-19
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公开(公告)号: US20090174007A1公开(公告)日: 2009-07-09
- 发明人: Jun NISHIMURA , Yoshiaki Asao
- 申请人: Jun NISHIMURA , Yoshiaki Asao
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-329243 20071220
- 主分类号: H01L29/68
- IPC分类号: H01L29/68
摘要:
A semiconductor memory device comprising: a support substrate; an insulating film formed on the support substrate; a semiconductor film formed on the insulating film; a gate insulating film formed on the semiconductor film; a gate electrode film formed on the gate insulating film; and a source region and a drain region formed in the semiconductor film so as to sandwich the gate insulating film in a gate length direction, the source and drain regions contacting the insulating film at the bottom surface, and the semiconductor memory device storing data corresponding to the amount of charges accumulated in the semiconductor film surrounded by the insulating film, the gate insulating film, and the source and drain regions and electrically floated, wherein a border length between the source region and the gate insulating film contiguous to each other is different from a border length between the drain region and the gate insulating film to each other.
公开/授权文献
- US07781803B2 Semiconductor memory device 公开/授权日:2010-08-24