发明申请
- 专利标题： Fine Particle Constituent Measuring Method and Fine-Particle Constituent Measuring Apparatus
- 专利标题（中）： 精细粒子成分测量方法和微粒成分测量仪器
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申请号： US12067381申请日： 2006-09-20
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公开(公告)号： US20090180114A1公开(公告)日： 2009-07-16
- 发明人: Takashi Fujii , Naohiko Goto , Megumi Miki , Takuya Nayuki , Koshichi Nemoto , Nobuyuki Tanaka
- 申请人： Takashi Fujii , Naohiko Goto , Megumi Miki , Takuya Nayuki , Koshichi Nemoto , Nobuyuki Tanaka
- 优先权： JP2005-272665 20050920
- 国际申请： PCT/JP2006/318647 WO 20060920
- 主分类号： G01N21/63
- IPC分类号： G01N21/63 ; G01J3/443
摘要：
Fine particles such as nanoparticles and microparticles is irradiated to generate plasma by focusing an ultrashort pulse laser beam 15 emitted from a laser device 16. More preferably, the plasma is generated by a filament 14 generated in the ultrashort pulse laser beam 15. A constituent of the fine particles is measured based on an emission spectrum from the plasma.
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