Invention Application
US20090183670A1 APPARATUS FOR MANUFACTURING HIGH-QUALITY SEMICONDUCTOR SINGLE CRYSTAL INGOT AND METHOD USING THE SAME
审中-公开
用于制造高质量半导体单晶的装置和使用该晶体的方法
- Patent Title: APPARATUS FOR MANUFACTURING HIGH-QUALITY SEMICONDUCTOR SINGLE CRYSTAL INGOT AND METHOD USING THE SAME
- Patent Title (中): 用于制造高质量半导体单晶的装置和使用该晶体的方法
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Application No.: US12356249Application Date: 2009-01-20
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Publication No.: US20090183670A1Publication Date: 2009-07-23
- Inventor: Hyon-Jong Cho , Young-Ho Hong , Hong-Woo Lee , Jong-Min Kang , Dae-Yeon Kim
- Applicant: Hyon-Jong Cho , Young-Ho Hong , Hong-Woo Lee , Jong-Min Kang , Dae-Yeon Kim
- Applicant Address: KR Gumi-city
- Assignee: SILTRON INC.
- Current Assignee: SILTRON INC.
- Current Assignee Address: KR Gumi-city
- Priority: KR10-2008-0006307 20080121
- Main IPC: C30B15/20
- IPC: C30B15/20

Abstract:
The present invention relates to an apparatus for manufacturing a high-quality semiconductor single crystal ingot and a method using the same. The apparatus of the present invention includes a quartz crucible, a heater installed around a side wall of the quartz crucible, a single crystal pulling means for pulling a single crystal from the semiconductor melt received in the quartz crucible, and a magnetic field applying means for forming a Maximum Gauss Plane (MGP) at a location of ML-1000 mm to ML-350 mm based on a Melt Level (ML) of the melt surface, and applying a strong magnetic field of 3000 to 5500 Gauss to an intersection between the MGP and the side wall of the quartz crucible and a weak magnetic field of 1500 to 3000 Gauss below a solid-liquid interface.
Public/Granted literature
- US2658608A Conveying apparatus Public/Granted day:1953-11-10
Information query
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