发明申请
- 专利标题： Interferometric measurement of DLC layer on magnetic head
- 专利标题（中）： 磁头DLC层的干涉测量
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申请号： US12009424申请日： 2008-01-18
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公开(公告)号： US20090185193A1公开(公告)日： 2009-07-23
- 发明人: Florin Munteanu , Dong Chen , Erik L. Novak , G. Lawrence Best
- 申请人： Florin Munteanu , Dong Chen , Erik L. Novak , G. Lawrence Best
- 申请人地址： US AZ Tucson
- 专利权人： VEECO INSTRUMENTS, INC.
- 当前专利权人： VEECO INSTRUMENTS, INC.
- 当前专利权人地址： US AZ Tucson
- 主分类号： G01B11/02
- IPC分类号： G01B11/02
摘要：
An explicit relationship is developed between the ratio of average interferometric modulation produced by diamond-like carbon (DLC)-coated magnetic-head surfaces and the thickness of the DLC layer. Accordingly, the thickness of the DLC layer is calculated in various manners from modulation data acquired for the system using object surfaces of known optical parameters.
公开/授权文献
- US07808652B2 Interferometric measurement of DLC layer on magnetic head 公开/授权日：2010-10-05
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