发明申请
- 专利标题: TURBO VACUUM PUMP
- 专利标题(中): 涡轮真空泵
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申请号: US12365314申请日: 2009-02-04
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公开(公告)号: US20090196734A1公开(公告)日: 2009-08-06
- 发明人: Hiroyasu Kawashima , Shinichi Sekiguchi
- 申请人: Hiroyasu Kawashima , Shinichi Sekiguchi
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-025522 20080205
- 主分类号: F04D19/04
- IPC分类号: F04D19/04 ; F04D29/32 ; F04D29/54
摘要:
A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.
公开/授权文献
- US08172515B2 Turbo vacuum pump 公开/授权日:2012-05-08
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