Turbo vacuum pump and semiconductor manufacturing apparatus having the same
    1.
    发明申请
    Turbo vacuum pump and semiconductor manufacturing apparatus having the same 有权
    涡轮真空泵和具有相同功能的半导体制造装置

    公开(公告)号:US20050042118A1

    公开(公告)日:2005-02-24

    申请号:US10921197

    申请日:2004-08-19

    摘要: A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.

    摘要翻译: 涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。 涡轮真空泵包括具有进气口的壳体,包括转子叶片和容纳在壳体中的定子叶片的泵部分,用于支撑转子叶片的轴承,用于旋转转子叶片的马达; 以及旋转轴,其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。

    Turbo vacuum pump and semiconductor manufacturing apparatus having the same
    2.
    发明授权
    Turbo vacuum pump and semiconductor manufacturing apparatus having the same 有权
    涡轮真空泵和具有相同功能的半导体制造装置

    公开(公告)号:US08066495B2

    公开(公告)日:2011-11-29

    申请号:US12613854

    申请日:2009-11-06

    IPC分类号: F04B35/04

    摘要: A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.

    摘要翻译: 涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。 涡轮真空泵包括具有进气口的壳体,包括转子叶片和容纳在壳体中的定子叶片的泵部分,用于支撑转子叶片的轴承,用于旋转转子叶片的马达; 以及旋转轴,其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。

    TURBO VACUUM PUMP AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING THE SAME
    3.
    发明申请
    TURBO VACUUM PUMP AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING THE SAME 有权
    涡轮真空泵及其半导体制造设备

    公开(公告)号:US20100047096A1

    公开(公告)日:2010-02-25

    申请号:US12613854

    申请日:2009-11-06

    摘要: A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.

    摘要翻译: 涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。 涡轮真空泵包括具有进气口的壳体,包括转子叶片和容纳在壳体中的定子叶片的泵部分,用于支撑转子叶片的轴承,用于旋转转子叶片的马达; 以及旋转轴,其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。

    TURBO VACUUM PUMP
    4.
    发明申请
    TURBO VACUUM PUMP 有权
    涡轮真空泵

    公开(公告)号:US20090196734A1

    公开(公告)日:2009-08-06

    申请号:US12365314

    申请日:2009-02-04

    IPC分类号: F04D19/04 F04D29/32 F04D29/54

    摘要: A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.

    摘要翻译: 涡轮真空泵,包括沿轴向吸入气体的吸入部23A; 排出部分50,其排出由抽吸部分23A吸入的气体,排出部分50具有多个旋转叶轮70,80和固定叶轮71,其被布置成与多个旋转叶轮70,80中的每一个相对 ; 以及旋转多个旋转叶轮70,80的旋转轴21,其中多个旋转叶轮70,80包括用于沿着轴向排出吸入气体的第一涡轮机叶轮70的至少一个级,第一涡轮叶轮 70被固定到旋转轴21的吸入部侧端面15,以及固定到旋转轴21上的第二涡轮机叶轮80的至少一个台阶,其延伸穿过第二涡轮机叶轮80,第二涡轮机叶轮80 布置在第一涡轮叶轮70的下游。

    Turbo vacuum pump
    5.
    发明授权
    Turbo vacuum pump 有权
    涡轮真空泵

    公开(公告)号:US08172515B2

    公开(公告)日:2012-05-08

    申请号:US12365314

    申请日:2009-02-04

    摘要: A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.

    摘要翻译: 涡轮真空泵,包括沿轴向吸入气体的吸入部23A; 排出部分50,其排出由抽吸部分23A吸入的气体,排出部分50具有多个旋转叶轮70,80和固定叶轮71,其被布置成与多个旋转叶轮70,80中的每一个相对 ; 以及使多个旋转叶轮70,80旋转的旋转轴21,其中,多个旋转叶轮70,80包括用于沿着轴向排出吸入气体的第一涡轮机叶轮70的至少一级,第一涡轮叶轮 70被固定到旋转轴21的吸入部侧端面15,以及固定到旋转轴21上的第二涡轮机叶轮80的至少一个台阶,其延伸穿过第二涡轮机叶轮80,第二涡轮机叶轮80 布置在第一涡轮叶轮70的下游。

    Turbo vacuum pump and semiconductor manufacturing apparatus having the same
    6.
    发明授权
    Turbo vacuum pump and semiconductor manufacturing apparatus having the same 有权
    涡轮真空泵和具有相同功能的半导体制造装置

    公开(公告)号:US07717684B2

    公开(公告)日:2010-05-18

    申请号:US10921197

    申请日:2004-08-19

    IPC分类号: F04B35/04

    摘要: A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.

    摘要翻译: 涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。 涡轮真空泵包括具有进气口的壳体,包括转子叶片和容纳在壳体中的定子叶片的泵部分,用于支撑转子叶片的轴承,用于旋转转子叶片的马达; 以及旋转轴,其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。

    Flowmeter having a float and a displacement sensor
    7.
    发明授权
    Flowmeter having a float and a displacement sensor 失效
    具有浮子和位移传感器的流量计

    公开(公告)号:US07360454B2

    公开(公告)日:2008-04-22

    申请号:US11418142

    申请日:2006-05-05

    IPC分类号: G01F1/22

    CPC分类号: G01F1/28 G01F1/22

    摘要: A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter includes: a casing having an enlarged portion and being disposed vertically; and a float enclosed in the enlarged portion of the casing and at least partly having a detection surface. The float is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing. The flowmeter also includes at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.

    摘要翻译: 流量计可以测量流量小的流量,测量精度高,可制成小型化,可以处理各种类型的化学药品,并能以低成本轻松生产。 该流量计包括:具有放大部分并垂直设置的壳体; 以及包围在壳体的扩大部分中并且至少部分地具有检测表面的浮子。 浮子被从下方流入壳体的液体向上推,并在壳体内向上流动。 流量计还包括设置在壳体的扩大部分外部的至少一个位移传感器,用于通过磁化浮子的检测表面来检测浮子的轴向位移。

    Flowmeter
    8.
    发明申请
    Flowmeter 失效
    流量计

    公开(公告)号:US20060254368A1

    公开(公告)日:2006-11-16

    申请号:US11418142

    申请日:2006-05-05

    IPC分类号: G01F1/22

    CPC分类号: G01F1/28 G01F1/22

    摘要: A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter including: a casing having an enlarged portion and disposed vertically; a float, enclosed in the enlarged portion of the casing and at least partly having a detection surface, which is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing; and at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.

    摘要翻译: 流量计可以测量流量小的流量,测量精度高,可制成小型化,可以处理各种类型的化学药品,并能以低成本轻松生产。 该流量计包括:具有放大部分并垂直设置的壳体; 浮子,封闭在壳体的扩大部分中并且至少部分地具有检测表面,该检测表面将被从下方流入壳体并在壳体中向上流动的流体向上推动; 以及设置在壳体的扩大部分外侧的至少一个位移传感器,用于通过磁化浮子的检测表面来检测浮子的轴向位移。