发明申请
- 专利标题: Method for Producing Porous Microneedles and their Use
- 专利标题(中): 生产多孔微针的方法及其用途
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申请号: US12227509申请日: 2007-04-27
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公开(公告)号: US20090200262A1公开(公告)日: 2009-08-13
- 发明人: Dick Scholten , Julia Cassemeyer , Michael Stumber , Franz Laermer , Ando Feyh , Christian Maeurer
- 申请人: Dick Scholten , Julia Cassemeyer , Michael Stumber , Franz Laermer , Ando Feyh , Christian Maeurer
- 优先权: DE102006028781.9 20060623
- 国际申请: PCT/EP2007/054175 WO 20070427
- 主分类号: C23F1/00
- IPC分类号: C23F1/00
摘要:
A method for producing porous microneedles (10) situated in an array on a silicon substrate includes: providing a silicon substrate, applying a first etching mask, patterning microneedles using a DRIE process (“deep reactive ion etching”), removing the first etching mask, at least partially porosifying the Si substrate, the porosification beginning on the front side of the Si substrate and a porous reservoir being formed.
公开/授权文献
- US08354033B2 Method for producing porous microneedles and their use 公开/授权日:2013-01-15
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