发明申请
US20090200262A1 Method for Producing Porous Microneedles and their Use 失效
生产多孔微针的方法及其用途

Method for Producing Porous Microneedles and their Use
摘要:
A method for producing porous microneedles (10) situated in an array on a silicon substrate includes: providing a silicon substrate, applying a first etching mask, patterning microneedles using a DRIE process (“deep reactive ion etching”), removing the first etching mask, at least partially porosifying the Si substrate, the porosification beginning on the front side of the Si substrate and a porous reservoir being formed.
公开/授权文献
信息查询
0/0