发明申请
- 专利标题: ANTI-FUSE DEVICE STRUCTURE AND ELECTROPLATING CIRCUIT STRUCTURE AND METHOD
- 专利标题(中): 抗保护器件结构和电镀电路结构与方法
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申请号: US12031761申请日: 2008-02-15
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公开(公告)号: US20090206447A1公开(公告)日: 2009-08-20
- 发明人: Veeraraghavan S. Basker , Toshiharu Furukawa , William R. Tonti
- 申请人: Veeraraghavan S. Basker , Toshiharu Furukawa , William R. Tonti
- 主分类号: H01L23/525
- IPC分类号: H01L23/525 ; H01L21/44
摘要:
Disclosed are embodiments of a circuit and method for electroplating a feature (e.g., a BEOL anti-fuse device) onto a wafer. The embodiments eliminate the use of a seed layer and, thereby, minimize subsequent processing steps (e.g., etching or chemical mechanical polishing (CMP)). Specifically, the embodiments allow for selective electroplating metal or alloy materials onto an exposed portion of a metal layer in a trench on the front side of a substrate. This is accomplished by providing a unique wafer structure that allows a current path to be established from a power supply through a back side contact and in-substrate electrical connector to the metal layer. During electrodeposition, current flow through the current path can be selectively controlled. Additionally, if the electroplated feature is an anti-fuse device, current flow through this current path can also be selectively controlled in order to program the anti-fuse device.
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